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1.发明公开Apparatus and method for plasma treatment of resin material 失效Vorrichtung und Verfahren zur Plasmabearbeitung von Kunstharzmaterialien。
公开(公告)号：EP0326191A2
公开(公告)日：1989-08-02
申请号：EP89105490.0
申请日：1984-02-23
CPC分类号： H01J37/32357 , B01J3/006 , B01J19/126 , B01J2219/1227 , B05D3/144 , B29C59/14
摘要： An apparatus for plasma treatment is capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber. A plasma introducing port is formed in the wall of the reaction chamber. A plasma-irradiating pipe is connected to the plasma introducing port for injecting the plasma into the reaction chamber to irradiate th surfaces of the works. A discharge port is formed in the wall of the reaction chamber to reduce the internal pressure of the reaction chamber. A plurality of the works are rotated in relation to each other about a common axis, and also individual works are rotated independently from each other about their own axes.
摘要翻译： 用于等离子体处理的装置能够通过在真空反应室内用微波放电等离子体照射工件的表面来等离子体处理树脂材料的工作。 在反应室的壁上形成等离子体引入口。 等离子体照射管连接到等离子体引入口，用于将等离子体喷射到反应室中以照射工件的第三表面。 在反应室的壁上形成排出口，以减小反应室的内部压力。 多个作品围绕公共轴线相对于彼此旋转，并且单个作品围绕其自己的轴线彼此独立地旋转。
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公开(公告)号：EP0120307A3
公开(公告)日：1989-05-03
申请号：EP84101926.8
申请日：1984-02-23
IPC分类号： H01J37/32
CPC分类号： H01J37/32357 , B01J2219/0894 , B01J2219/1942 , B29C59/14 , B29K2023/00 , H01J37/18 , H01J2237/1825 , H01J2237/336
摘要： An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprises a plurality of long plasma-irradiating tubular pipes, each of which is provided along the length thereof with numerous small holes for injecting plasma, and at least one plasma-irradiating straight pipe disposed with its free end opening toward a section to which the plasma is hard to flow. At least one second plasma-irradiating pipe is located movably to an optional position within the reaction chamber. A method for surface plasma-treatment comprises dividing a microwave generated in a magnetron in a plurality of microwaves by a distributor, introducing the divided microwaves into a plurality of plasma generating mechanisms, respectively, and introducing plasmas generated in the respective plasma generating mechanisms intothe reaction chamber through a plurality of plasma introducing ports, respectively, formed in the wall of the reaction chamber.
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3.发明授权A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus 失效用于控制微波氧化等离子体表面处理装置的操作的方法
公开(公告)号：EP0129199B1
公开(公告)日：1987-04-08
申请号：EP84106753.1
申请日：1984-06-13
CPC分类号： H05H1/46 , B01J19/0006 , B01J19/126 , B01J2219/0894 , B29C59/14 , B29C2037/903
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公开(公告)号：EP0046867A1
公开(公告)日：1982-03-10
申请号：EP81105643.1
申请日：1981-07-17
CPC分类号： C23C22/00
摘要： A phosphating system of a type wherein objects are fully dipped into of a phosphate liquid contained in a bath. A nozzle means is provided for generating flows of the liquid directed to portions of the body having complicated configurations.
摘要翻译： 一种磷化系统，其中物体被完全浸入包含在浴中的磷酸盐液体中。 设置有用于产生指向具有复杂构造的身体部分的液体的流动的喷嘴装置。
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公开(公告)号：EP0120307B1
公开(公告)日：1994-06-15
申请号：EP84101926.8
申请日：1984-02-23
IPC分类号： H01J37/32
CPC分类号： H01J37/32357 , B01J2219/0894 , B01J2219/1942 , B29C59/14 , B29K2023/00 , H01J37/18 , H01J2237/1825 , H01J2237/336
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公开(公告)号：EP0117541B1
公开(公告)日：1990-05-02
申请号：EP84101935.9
申请日：1984-02-23
IPC分类号： H01J37/32
CPC分类号： H01J37/32357 , B01J3/006 , B05D3/144 , B29C59/14
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公开(公告)号：EP0040369B1
公开(公告)日：1984-02-15
申请号：EP81103487.5
申请日：1981-05-07
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公开(公告)号：EP0326191A3
公开(公告)日：1991-12-27
申请号：EP89105490.0
申请日：1984-02-23
CPC分类号： H01J37/32357 , B01J3/006 , B01J19/126 , B01J2219/1227 , B05D3/144 , B29C59/14
摘要： An apparatus for plasma treatment is capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber. A plasma introducing port is formed in the wall of the reaction chamber. A plasma-irradiating pipe is connected to the plasma introducing port for injecting the plasma into the reaction chamber to irradiate th surfaces of the works. A discharge port is formed in the wall of the reaction chamber to reduce the internal pressure of the reaction chamber. A plurality of the works are rotated in relation to each other about a common axis, and also individual works are rotated independently from each other about their own axes.
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公开(公告)号：EP0117541A3
公开(公告)日：1987-04-15
申请号：EP84101935
申请日：1984-02-23
IPC分类号： H01J37/32
CPC分类号： H01J37/32357 , B01J3/006 , B05D3/144 , B29C59/14
摘要： An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber. A plasma introducing port is formed in the wall of the reaction chamber. A plasma-irradiating pipe is connected to the plasma introducing port for injecting the plasma into the reaction chamber to irradiate the surfaces of the works. A discharge port is formed in the wall of the reaction chamber to reduce the internal pressure of the reaction chamber. A plasma diffuser includes a rotatable vane for diffusing the flow of plasma to distribute uniform density of plasma in the reaction chamber. A plurality of deflecting plates projecting from the inner wall of the reaction chamber toward the interior thereof may also be provided to diffuse the flow of plasma in the reaction chamber. In a method, a plurality of the works are rotated in relation to each other about a common axis, and also individual works are rotated independently from each other about their own axes.
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10.发明公开Apparatus and method for plasma treatment of resin material 失效Vorrichtung und Verfahren zur Plasmabehandlung von Kunstharz。
公开(公告)号：EP0152511A1
公开(公告)日：1985-08-28
申请号：EP84101938.3
申请日：1984-02-23
IPC分类号： B29C59/14
CPC分类号： H01J37/32357 , B29C59/14
摘要： A method for applying surface plasma-treatment to articles of resin material in a reaction chamber by irradiating the surfaces of the articles with a microwave discharge plasma within the reaction chamber, comprising injection the plasma form a plurality of positions located adjacently to the inner wall of the reaction chamber, and injecting the plasma from each injecting position in a certain speading angle along the direction of injection. An apparatus for plasma treatment, capable of plasma-treating articles of resin material by irradiating the surfaces of the articles with a microwave discharge plasma within a vacuum reaction chamber (1) which is in the form of a circular cylinder of 1000 mm or more in diameter, the form of a square prism of 1000 mm or more in the length of a side or an analogous form, comprising a plurality of plasma introducing ports (9, 10, 11) formed in the wall of the reaction chamber at optional positions thereon; and a glass pipe (12, 13, 14) connected to each plasma introducing port for injecting the plasma into the reaction chamber in a certain spreading angle along the direction of injection.
摘要翻译： 一种通过在反应室内用微波放电等离子体照射物品的表面来对反应室中的树脂材料制品进行表面等离子体处理的方法，包括：注入等离子体形成多个相邻于 反应室，并且沿着注射方向以一定的角度从每个注射位置注入等离子体。 一种用于等离子体处理的装置，其能够通过在真空反应室（1）内以微波放电等离子体照射物品表面等离子体处理树脂材料，所述真空反应室（1）为1000mm以上的圆柱形 直径，在侧面或类似形式的长度上为1000mm或更大的正方形棱镜的形式，包括形成在反应室的壁中的多个等离子体引入口（9,10,11），其位于其上的任选位置 ; 以及连接到每个等离子体引入口的玻璃管（12,13,14），用于沿着注射方向以一定的扩展角将等离子体注入到反应室中。
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