发明公开
EP0332300A2 Method and apparatus for measuring an interval between two objects
失效
方法和装置，用于测量两个物体之间的间隙。
- 专利标题： Method and apparatus for measuring an interval between two objects
- 专利标题（中）： 方法和装置，用于测量两个物体之间的间隙。
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申请号： EP89301473.8申请日： 1989-02-16
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公开(公告)号： EP0332300A2公开(公告)日： 1989-09-13
- 发明人: Ohwada, Mitsutoshi , Matsugu, Masakazu , Suda, Shigeyuki , Yoshii, Minoru , Niwa, Yukichi , Nose, Noriyuki , Saitoh, Kenji , Hasegawa, Masanobu
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP33206/88 19880216; JP225810/88 19880909
- 主分类号： G03B41/00
- IPC分类号： G03B41/00 ; G03F9/00 ; G03B27/53
摘要：
A device for measuring an interval between two plate-like objects (2, 3) includes a light source (LD) for projecting a light toward the objects, a detector (8) for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
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