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公开(公告)号：EP0336537B1
公开(公告)日：1995-12-20
申请号：EP89301477.9
申请日：1989-02-16
发明人： Saitoh, Kenji , Matsugu, Masakazu , Suda, Shigeyuki , Niwa, Yukichi , Kuroda, Ryo , Nose, Noriyuki , Yoshii, Minoru , Abe, Naoto , Ohwada, Mitsutoshi
IPC分类号： G03B41/00
CPC分类号： G03F9/7023 , G03F9/7049
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公开(公告)号：EP0332300B1
公开(公告)日：1995-06-14
申请号：EP89301473.8
申请日：1989-02-16
发明人： Ohwada, Mitsutoshi , Matsugu, Masakazu , Suda, Shigeyuki , Yoshii, Minoru , Niwa, Yukichi , Nose, Noriyuki , Saitoh, Kenji , Hasegawa, Masanobu
CPC分类号： G03F9/7023 , G03F9/7049
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3.发明公开
公开(公告)号：EP0411966A2
公开(公告)日：1991-02-06
申请号：EP90308601.5
申请日：1990-08-03
CPC分类号： G03F9/7076
摘要： A position detecting method for detecting the position of a substrate by use of a grating pattern provided on the substrate includes irradiating the grating pattern with first and second radiation beams having different wavelengths to produce first and second diffraction beams of different wavelengths; and receiving the first and second diffraction beams by use of a sensor to determine the position of the substrate on the basis of the position of incidence of each of the first and second diffraction beams on the sensor.
摘要翻译： 通过使用设置在基板上的光栅图案来检测基板的位置的位置检测方法包括用具有不同波长的第一和第二辐射束照射光栅图案以产生不同波长的第一和第二衍射光束; 以及通过使用传感器接收第一和第二衍射光束，以基于传感器上的第一和第二衍射光束的入射位置来确定衬底的位置。
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4.发明公开Device for detecting positional relationship between two objects 失效Vorrichtung zum Nachweis derörtlichenBeziehung zwischen zwei Objekten。
公开(公告)号：EP0336537A1
公开(公告)日：1989-10-11
申请号：EP89301477.9
申请日：1989-02-16
发明人： Saitoh, Kenji , Matsugu, Masakazu , Suda, Shigeyuki , Niwa, Yukichi , Kuroda, Ryo , Nose, Noriyuki , Yoshii, Minoru , Abe, Naoto , Ohwada, Mitsutoshi
IPC分类号： G03B41/00
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for detecting positional relationship between first and second objects direction is disclosed. The includes a light source for emitting light in a direction to the first or second object, a first detecting portion the position of incidence of a first light deflected by the first and second objects wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. Second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination.
摘要翻译： 公开了一种用于检测第一和第二物体方向之间的位置关系的装置。 所述光源包括用于沿朝向所述第一或第二物体的方向发光的光源，第一检测部分由所述第一和第二物体偏转的第一光的入射位置，其中所述第一光的入射位置在所述第一检测 部分可随着第一和第二物体在预定方向上的位置关系的变化而变化。 第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态 在预定方向上与第一光不同。 基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受倾斜的影响。
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公开(公告)号：EP0411966A3
公开(公告)日：1991-04-17
申请号：EP90308601.5
申请日：1990-08-03
CPC分类号： G03F9/7076
摘要： A position detecting method for detecting the position of a substrate by use of a grating pattern provided on the substrate includes irradiating the grating pattern with first and second radiation beams having different wavelengths to produce first and second diffraction beams of different wavelengths; and receiving the first and second diffraction beams by use of a sensor to determine the position of the substrate on the basis of the position of incidence of each of the first and second diffraction beams on the sensor.
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公开(公告)号：EP0332300A3
公开(公告)日：1989-10-11
申请号：EP89301473.8
申请日：1989-02-16
发明人： Ohwada, Mitsutoshi , Matsugu, Masakazu , Suda, Shigeyuki , Yoshii, Minoru , Niwa, Yukichi , Nose, Noriyuki , Saitoh, Kenji , Hasegawa, Masanobu
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects (2, 3) includes a light source (LD) for projecting a light toward the objects, a detector (8) for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
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公开(公告)号：EP0332300A2
公开(公告)日：1989-09-13
申请号：EP89301473.8
申请日：1989-02-16
发明人： Ohwada, Mitsutoshi , Matsugu, Masakazu , Suda, Shigeyuki , Yoshii, Minoru , Niwa, Yukichi , Nose, Noriyuki , Saitoh, Kenji , Hasegawa, Masanobu
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects (2, 3) includes a light source (LD) for projecting a light toward the objects, a detector (8) for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
摘要翻译： 一种用于两个板状物体间间隔的测量装置（2，3）包括用于向物体投射光的光源（LD），检测器（8），用于检测入射的位置处，在预定的表面，的 由光源投影并通过偏转两个对象的光，并且用于测量所述检测器检测的基础上，两个对象的间隔计算部分。
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