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35 条记录 (耗时 0.018 秒)

    Exposure apparatus
    3.
    发明公开
    Exposure apparatus 失效
    曝光装置

    公开(公告)号：EP0419240A3

    公开(公告)日：1992-01-02

    申请号：EP90310267.1

    申请日：1990-09-19

    申请人： CANON KABUSHIKI KAISHA

    发明人： Nose, Noriyuki ,  Ebinuma, Ryuichi ,  Ozawa, Kunitaka ,  Kariya, Takao ,  Uzawa, Shunichi

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70066

    摘要： An exposure apparatus includes a light source for exposing a wafer (2) through a mask (1); a light blocking device (4) being movable and effective to block light from the light source to limit an exposure zone; a positional deviation detecting system (6) for detecting positional deviation between the mask and the wafer; and a drive control system (31,61) for moving the light blocking device to execute position control therefor, on the basis of a detection signal from the positional deviation detecting system.

    摘要翻译： 一种曝光设备包括：用于通过掩模（1）曝光晶片（2）的光源; 遮光装置（4）可移动并且有效地阻挡来自光源的光以限制曝光区域; 位置偏差检测系统（6），用于检测掩模和晶片之间的位置偏差; 以及驱动控制系统（31,61），用于根据来自位置偏差检测系统的检测信号移动遮光装置以执行其位置控制。

    Intraocular lens
    4.
    发明公开
    Intraocular lens 失效
    Intraokulare亚麻籽

    公开(公告)号：EP0293560A1

    公开(公告)日：1988-12-07

    申请号：EP88103523.2

    申请日：1988-03-07

    申请人： CANON KABUSHIKI KAISHA

    发明人： Kushibiki, Nobuo ,  Nose, Noriyuki ,  Niwa, Yukichi ,  Kaneko, Norio

    IPC分类号： C08L83/04 ,  A61L27/00 ,  A61F2/16

    CPC分类号： A61L27/14 ,  A61F2/16 ,  A61L27/26 ,  A61L2430/16 ,  C08G77/12 ,  C08G77/20 ,  C08L83/04 ,  C08L83/00

    摘要： A composition for an intraocular lens comprising, an organopolysiloxane (A) having a viscosity of 10,000 cp or below and comprising at least one unsaturated aliphatic group, an organopolysiloxane (B) comprising at least three hydrogenated silyl units and a platinum compound; wherein the platinum compound based on its platinum content constitutes 10 - 200 ppm by weight of the composition. The composition provides a homogeneous intraocular lens even when it is injected into a crystalline capsule through a slender tube such as an injection needle.

    摘要翻译： 一种眼内透镜用组合物，其特征在于，具有粘度为10000cp以下且包含至少一种不饱和脂肪族基团的有机聚硅氧烷（A），含有至少三个氢化甲硅烷基单元的有机聚硅氧烷（B）和铂化合物; 其中铂化合物基于其铂含量构成组合物重量的10-200ppm。 即使当通过诸如注射针的细长管注射到结晶胶囊中时，组合物也提供均匀的眼内透镜。

    Length-measuring device and exposure apparatus
    6.
    发明公开
    Length-measuring device and exposure apparatus 失效
    长度测量装置和曝光装置

    公开(公告)号：EP0511847A3

    公开(公告)日：1993-01-20

    申请号：EP92303864.0

    申请日：1992-04-29

    申请人： CANON KABUSHIKI KAISHA

    发明人： Nose, Noriyuki ,  Saito, Kenji ,  Amemiya, Mitsuaki

    IPC分类号： G03F9/00

    CPC分类号： G03F7/70616 ,  G03F7/70633 ,  G03F9/7023 ,  G03F9/7049

    摘要： A length measuring device for performing length measurement and an exposure apparatus for performing an exposure operation on a first object (2) having a plurality of alignment patterns (2a,2b) thereon, includes an alignment detector for detecting the relative positional relation between the first object (2) and a second object (1) having a plurality of reference alignment patterns (1a,1b) used for aligning the first object therewith, and for detecting an alignment condition between the alignment patterns of the first and second objects, a movement device for moving the first and second objects relative to each other, a measurement device for measuring the amount of movement of the movement device, and a length measurement device for performing measurement of the space between the plurality of alignment patterns formed on the first object. The length measurement device performs length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of the alignment detector between the plurality of reference alignment patterns on the second object and the pluralty of alignment patterns on the first object, as well as the amount of movement of the movement device measured by the measurement device during the successive alignment condition detection operations of the alignment detector.

    Device for detecting positional relationship between two objects
    9.
    发明公开
    Device for detecting positional relationship between two objects 失效
    用于检测两个对象之间的位置关系的设备

    公开(公告)号：EP0358511A3

    公开(公告)日：1990-12-27

    申请号：EP89309094.4

    申请日：1989-09-07

    申请人： CANON KABUSHIKI KAISHA

    发明人： Nose, Noriyuki ,  Abe, Naoto

    IPC分类号： G03F9/00

    CPC分类号： G03F9/7076 ,  G03F9/7023

    摘要： A device for detecting positional relationship between opposed first and second objects, includes a light source for projecting light to the first and second objects; a photodetecting system for detecting two lights from one of the first and second objects illuminated by the light from the light source, the photodetecting system detecting those two lights the position of incidence of each of which on a predetermined plane is changeable with the positional relationship between the first and second objects in a direction perpendicular to the direction in which the first and second objects are opposed; a position detecting system for detecting the positional relationship between the first and second objects in a direction perpendicular to the opposing direction of the first and second objects, on the basis of the relationship of the two lights, on the predetermined plane, as detected by the photodetecting system; and an interval detecting system for detecting the positional relationship between the first and second objects in the opposing direction, by using at least one of the two lights detected by the photodetecting system.

    Device for detecting positional relationship between two objects
    10.
    发明公开
    Device for detecting positional relationship between two objects 失效
    Vorrichtung zur Detektion der Positionsrelation zwischen zwei Objekten。

    公开(公告)号：EP0358511A2

    公开(公告)日：1990-03-14

    申请号：EP89309094.4

    申请日：1989-09-07

    申请人： CANON KABUSHIKI KAISHA

    发明人： Nose, Noriyuki ,  Abe, Naoto

    IPC分类号： G03F9/00

    CPC分类号： G03F9/7076 ,  G03F9/7023

    摘要： A device for detecting positional relationship between opposed first and second objects, includes a light source for projecting light to the first and second objects; a photodetecting system for detecting two lights from one of the first and second objects illuminated by the light from the light source, the photodetecting system detecting those two lights the position of incidence of each of which on a predetermined plane is changeable with the positional relationship between the first and second objects in a direction perpendicular to the direction in which the first and second objects are opposed; a position detecting system for detecting the positional relationship between the first and second objects in a direction perpendicular to the opposing direction of the first and second objects, on the basis of the relationship of the two lights, on the predetermined plane, as detected by the photodetecting system; and an interval detecting system for detecting the positional relationship between the first and second objects in the opposing direction, by using at least one of the two lights detected by the photodetecting system.

    摘要翻译： 一种用于检测相对的第一和第二物体之间的位置关系的装置，包括用于将光投射到第一（68）和第二物体（60）的光源（72） 用于从由光源照射的第一和第二物体中的一个物体检测两个光的光电检测系统（82），检测这两个光的光检测系统，其中每个光源在预定平面上的入射位置可以随着 在与第一和第二物体相对的方向垂直的方向上的第一和第二物体之间的位置关系; 位置检测系统，用于基于两个光在预定平面上的关系，根据由第一和第二物体的相反方向垂直于垂直于第一和第二物体的方向的方向，检测第一和第二物体之间的位置关系 光电检测系统; 以及间隔检测系统，用于通过使用由光检测系统检测到的两个光中的至少一个来检测相对方向上的第一和第二物体之间的位置关系。