发明公开
- 专利标题： EP0577667A4 -
- 专利标题（中）： EP0577667A4 - Google专利
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申请号： EP92907222申请日： 1992-03-25
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公开(公告)号： EP0577667A4公开(公告)日： 1994-02-23
- 发明人: MARTIN, PHILIP, JAMES , NETTERFIELD, ROGER, PRICE , KINDER, TERENCE, JOHN
- 申请人： COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
- 申请人地址： LIMESTONE AVENUE; CAMPBELL, AUSTRALIAN CAPITAL TERRITORY 2601
- 专利权人： COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
- 当前专利权人： COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
- 当前专利权人地址： LIMESTONE AVENUE; CAMPBELL, AUSTRALIAN CAPITAL TERRITORY 2601
- 优先权： AUPK528291 1991-03-25
- 主分类号： H01J27/08
- IPC分类号： H01J27/08 ; C23C14/08 ; C23C14/22 ; H01J37/05 ; H01J37/08 ; H01J37/317 ; H01J37/32 ; H01J37/36 ; H01L21/265 ; H01L21/31 ; H01L21/314 ; H01L21/316 ; H05H1/46
摘要：
An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Torroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8). Also claimed is a method of producing vanadium dioxide.
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