发明公开
EP0594182A3 Anode bonding method and acceleration sensor obtained by using the anode bonding method
失效
使用阳极接合方法获得的阳极结合方法和加速度传感器
- 专利标题： Anode bonding method and acceleration sensor obtained by using the anode bonding method
- 专利标题（中）： 使用阳极接合方法获得的阳极结合方法和加速度传感器
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申请号： EP93117100.3申请日： 1993-10-21
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公开(公告)号： EP0594182A3公开(公告)日： 1997-09-24
- 发明人: Akaike, Masatake, c/o Canon Kabushiki Kaisha , Yagi, Takayuki, c/o Canon Kabushiki Kaisha , Fushimi, Masahiro, c/o Canon Kabushiki Kaisha
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Pellmann, Hans-Bernd, Dipl.-Ing.
- 优先权： JP284341/92 19921022
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; G01P15/12
摘要：
An anode bonding method for bonding a first substrate and a second substrate, both of which have a recessed portion, includes the steps of heating the first and second substrates in a stacked state; and bonding the substrates by applying a voltage between the substrates.
公开/授权文献
- EP0594182B1 Anode bonding methods 公开/授权日：2002-07-31
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