发明公开
EP0614089A2 Method and apparatus for in-situ testing of integrated circuit chips
失效
Verfahren und Vorrichtung zum in situ Testen von Clips mit integrierten Schaltungen。
- 专利标题: Method and apparatus for in-situ testing of integrated circuit chips
- 专利标题(中): Verfahren und Vorrichtung zum in situ Testen von Clips mit integrierten Schaltungen。
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申请号: EP94102896.1申请日: 1994-02-25
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公开(公告)号: EP0614089A2公开(公告)日: 1994-09-07
- 发明人: Bhatt, Anilkumar Ch. , Buda, Leo Raymond , Edwards, Robert Douglas , Hart, Paul Joseph , Ingraham, Anthony P. , Markovich, Voya Rista , Molla, Jaynal A. , Murphy, Richard Gerald , Saxenmeyer Jr. George J. , Walker, George F. , Whalen, Bette J. , Zarr, Richard S.
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构: Lindner-Vogt, Karin, Dipl.-Phys.
- 优先权: US24549 19930301
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; H01L21/66 ; G01R1/04
摘要:
A method of testing semiconductor chips is disclosed. The individual semiconductor chips have I/O, power, and ground contacts. In the method of the invention a chip carrier is provided. The chip carrier has contacts corresponding to the contacts on the semiconductor chip. The carrier contacts have dendritic surfaces. The chip contacts are brought into conductive contact with the conductor pads on the chip carrier. Test signal input vectors are applied to the inputs of the semiconductor chip, and output signal vectors are recovered from the semiconductor chip. After testing, the chip may be removed from the substrate. Alternatively, the chip may be bonded through the dendritic conductor pads to the substrate after successful testing.
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