发明授权
- 专利标题： VERFAHREN UND EINRICHTUNG ZUR VORBEHANDLUNG VON SUBSTRATEN
- 专利标题（英）： Method and device for pre-treatment of substrates
- 专利标题（中）： 方法和设备处理基质的
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申请号： EP96939061.6申请日： 1996-11-15
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公开(公告)号： EP0867036B1公开(公告)日： 2001-07-18
- 发明人: GOEDICKE, Klaus , FIETZKE, Fred , RESCHKE, Jonathan , HEMPEL, Wolfgang , SCHEFFEL, Bert , METZNER, Christoph , SCHILLER, Siegfried
- 申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 申请人地址： Leonrodstrasse 54 80636 München DE
- 专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人地址： Leonrodstrasse 54 80636 München DE
- 优先权： DE19546826 19951215
- 国际公布： WO9722988 19970626
- 主分类号： H01J37/32
- IPC分类号： H01J37/32 ; C23C14/02 ; C23C14/35
摘要：
Known methods and devices for pre-treatment of electrically conducting and non-conducting substrates require a relatively high level of technical outlay and are difficult to incorporate into the following coating process. Pre-treatment frequently does not ensure the adhesion required for coating. The invention proposes to maintain a low pressure glow discharge between the substrate to be cleaned and a counter-electrode. The substrate is periodically alternately switched as a cathode or anode, the frequency of the alternation being set in the range of from 1 Hz to 1000 Hz and the pulse lengths and/or the discharge voltage being independently adjustable. The method is used as a preliminary process for the coating of substrates which require an adhesive layer. Cutting tools, in particular, made of steel, hard metal or ceramic are treated before being coated.
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