A topographic head (100) for profilometry and AFM supports a central paddle (108) by coaxial torsion bars (104) projecting inward from an outer frame (102). A tip (118) projects from the paddle distal from the bars. The torsion bars include an integrated paddle rotation sensor (142). An XYZ stage (200) may carry the topographic head for X, Y and Z axis translation. The XYZ stage's fixed outer base (202) is coupled to an X-axis stage (204) via a plurality of flexures (206). The X-axis stage is coupled to a Y-axis stage (212) also via a plurality of flexures (214). One of each set of flexures includes a shear stress sensor (222). A Z-axis stage (238) may also be included to provide an integrated XYZ scanning stage. The topographic head's frame, bars and paddle, and the XYZ stage's stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer (252a, 252b, 262).