发明授权
- 专利标题: COUCHE EPITAXIALE DE NITRURE DE GALLIUM
- 专利标题(英): Gallium nitride epitaxial layer
- 专利标题(中): EPITAKTISCHE GALLIUMNITRIDCHICHT
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申请号: EP98950142.4申请日: 1998-10-15
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公开(公告)号: EP1034325B9公开(公告)日: 2006-01-04
- 发明人: BEAUMONT, Bernard , GIBART, Pierre , GUILLAUME, Jean-Claude , NATAF, Gilles , VAILLE, Michel , HAFFOUZ, Soufien
- 申请人: Lumilog
- 申请人地址: 2720 Chemin de Saint Bernard 06220 Vallauris FR
- 专利权人: Lumilog
- 当前专利权人: Lumilog
- 当前专利权人地址: 2720 Chemin de Saint Bernard 06220 Vallauris FR
- 代理机构: Ahner, Francis
- 优先权: FR9713096 19971020
- 国际公布: WO1999020816 19990429
- 主分类号: C30B25/02
- IPC分类号: C30B25/02 ; H01L33/00 ; C30B29/40
摘要:
The invention concerns a method for producing a gallium nitride (GaN) epitaxial layer characterised in that it consists in depositing on a substrate a dielectric layer acting as a mask and depositing on the masked gallium nitride, by epitaxial deposit, so as to induce the deposit of gallium nitride patterns and the anisotropic lateral growth of said patterns, the lateral growth being pursued until the different patterns coalesce. The deposit of the gallium nitride patterns can be carried out ex-situ by dielectric etching or in-situ by treating the substrate for coating it with a dielectric film whereof the thickness is of the order of one angstrom. The invention also concerns the gallium nitride layers obtained by said method.
公开/授权文献
- EP1034325B1 COUCHE EPITAXIALE DE NITRURE DE GALLIUM 公开/授权日:2005-08-31
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