发明公开
EP1254874A4 CARBON-CONTAINING ALUMINUM NITRIDE SINTERED COMPACT, AND CERAMIC SUBSTRATE FOR USE IN APPARATUS FOR MANUFACTURING AND INSPECTING SEMICONDUCTOR
审中-公开
碳基氮化铝,陶瓷基板FOR USE IN DEVICES为生产和验证,半导体学报
- 专利标题: CARBON-CONTAINING ALUMINUM NITRIDE SINTERED COMPACT, AND CERAMIC SUBSTRATE FOR USE IN APPARATUS FOR MANUFACTURING AND INSPECTING SEMICONDUCTOR
- 专利标题(中): 碳基氮化铝,陶瓷基板FOR USE IN DEVICES为生产和验证,半导体学报
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申请号: EP00913091申请日: 2000-04-04
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公开(公告)号: EP1254874A4公开(公告)日: 2005-01-05
- 发明人: HIRAMATSU YASUJI , ITO YASUTAKA
- 申请人: IBIDEN CO LTD
- 专利权人: IBIDEN CO LTD
- 当前专利权人: IBIDEN CO LTD
- 优先权: JP37216399 1999-12-28; JP37216499 1999-12-28; JP37216599 1999-12-28; JP37216699 1999-12-28
- 主分类号: C04B35/581
- IPC分类号: C04B35/581 ; C04B35/593 ; C04B35/597 ; C04B35/634 ; C04B35/645 ; G01R1/073 ; G01R3/00 ; H01L21/683
摘要:
A carbon-containing aluminum nitride sintered compact comprising an aluminum nitride matrix and, incorporated therein, a carbon which has peaks appearing in the vicinity of 1580 cm and 1355 cm as measured by the laser Raman spectrometry. The carbon-containing aluminum nitride sintered compact does not suffer from a short circuit due to its satisfactorily high volume resistivity of at least 1 x 10 OMEGA • cm in a high temperature region of 200 DEG C or higher (for example, 500 DEG C or so), is excellent in hiding properties, is increased with respect to radiant heat and can secure high accuracy in the measurement by a surface thermometer.
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