发明公开
- 专利标题： HIGH REPETITION RATE EXCIMER LASER SYSTEM
- 专利标题（中）： 麻省理工学院麻省理工学院
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申请号： EP02728380申请日： 2002-03-01
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公开(公告)号： EP1371117A4公开(公告)日： 2006-10-11
- 发明人: PELL MICHAEL A , SMITH CHARLENE M , THEN PAUL M , SPARROW ROBERT W
- 申请人： CORNING INC
- 专利权人： CORNING INC
- 当前专利权人： CORNING INC
- 优先权： US27281401 2001-03-02
- 主分类号： C30B29/12
- IPC分类号： C30B29/12 ; C30B11/00 ; H01S3/02 ; H01S3/034 ; H01S3/08 ; H01S3/1055 ; H01S3/106 ; H01S3/225
摘要：
The invention relates to an High Repetition Rate UV Excimer Laser which includes a source of a laser beam and one or more windows which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam.
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