- 专利标题: BESCHICHTUNGSVORRICHTUNG MIT TRANSPORTEINRICHTUNG
- 专利标题(英): Coating device comprising a conveying device
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申请号: EP03732467.0申请日: 2003-05-26
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公开(公告)号: EP1507894B1公开(公告)日: 2005-12-14
- 发明人: BEHLE, Stephan , LÜTTRINGHAUS-HENKEL, Andreas , BAUCH, Hartmut
- 申请人: Schott AG
- 申请人地址: Hattenbergstrasse 10 55122 Mainz DE
- 专利权人: Schott AG
- 当前专利权人: Schott AG
- 当前专利权人地址: Hattenbergstrasse 10 55122 Mainz DE
- 代理机构: Herden, Andreas F.
- 优先权: DE10223288 20020524; DE10224395 20020601; DE10227637 20020620; DE10314067 20030328
- 国际公布: WO2003100128 20031204
- 主分类号: C23C16/54
- IPC分类号: C23C16/54 ; C23C16/04 ; C23C16/458 ; C23C14/50 ; C23C14/04 ; C23C14/56
摘要:
The aim of the invention is to render vacuum coating of substrates (11) more economical. Said aim is achieved by a device (1) for vacuum-coating substrates, comprising a conveying device, at least one coating station (7, 71, 72, , 7N) which is provided with several coating locations (91 - 94) and is conveyed on the conveying device, an evacuating device, and a device for rotating the coating locations (91 - 94) on the conveying device.
公开/授权文献
- EP1507894A1 BESCHICHTUNGSVORRICHTUNG MIT TRANSPORTEINRICHTUNG 公开/授权日:2005-02-23
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