发明公开
- 专利标题： BE- UND ENTLADEVORRICHTUNG FÜR EINE BESCHICHTUNGSEINRICHTUNG
- 专利标题（英）： Loading and unloading device for a coating unit
- 专利标题（中）： 储藏处理的涂布装置
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申请号： EP03764944.9申请日： 2003-07-07
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公开(公告)号： EP1523585A2公开(公告)日： 2005-04-20
- 发明人: JÜRGENSEN, Holger , KÄPPELER, Johannes , FRANKEN, Walter
- 申请人： Aixtron AG
- 申请人地址： Kackertstrasse 15-17 52072 Aachen DE
- 专利权人： Aixtron AG
- 当前专利权人： Aixtron AG
- 当前专利权人地址： Kackertstrasse 15-17 52072 Aachen DE
- 代理机构： Grundmann, Dirk, Dr.
- 优先权： DE10232731 20020719
- 国际公布： WO2004009299 20040129
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; H01L21/00
摘要：
The invention relates to a device for loading at least one substrate (1) into a process chamber of a coating unit and unloading the at least one substrate (1) therefrom by means of a gripper (2) of a handling machine. The inventive device comprises a loading plate (3) which can be gripped by the gripper (2) and embodies a storage place for each at least one substrate (1), said storage place being formed by an edge (4) of an opening (5) that is assigned to each substrate (1). The inventive device also comprises a substrate holder (7) that is provided with a pedestal-type substrate support which is adapted to the loading plate (3) and on which the substrate plate can be placed such that some sectors of the surface of the substrate support are located at a certain gap distance from the substrate or the substrate lies in a planar manner on a sector of the surface.
公开/授权文献
- EP1523585B1 BE- UND ENTLADEVORRICHTUNG FÜR EINE BESCHICHTUNGSEINRICHTUNG 公开/授权日：2009-05-20
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