发明公开
EP1596422A2 Apparatus and method for semiconductor chip detachment
有权
Apparat und Methode zumAblöseneines Halbleiter-Chips
- 专利标题: Apparatus and method for semiconductor chip detachment
- 专利标题(中): Apparat und Methode zumAblöseneines Halbleiter-Chips
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申请号: EP05076097.4申请日: 2005-05-10
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公开(公告)号: EP1596422A2公开(公告)日: 2005-11-16
- 发明人: Cheung, Yiu Ming , Liu, Chou Kee, Peter , Yiu, Ching Hong , Chong, Chi Ming
- 申请人: ASM Assembly Automation Ltd.
- 申请人地址: 20/F., Watson Centre, 16-22 Kung Yip Street Kwai Chung, Hong Kong CN
- 专利权人: ASM Assembly Automation Ltd.
- 当前专利权人: ASM Assembly Automation Ltd.
- 当前专利权人地址: 20/F., Watson Centre, 16-22 Kung Yip Street Kwai Chung, Hong Kong CN
- 代理机构: Griebling, Onno
- 优先权: US843826 20040511
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
An apparatus and method is provided for detaching a semiconductor chip from an adhesive tape on which it is mounted. The apparatus comprises a platform adapted to contact the adhesive tape at a position of the chip and a retaining force generator coupled to the platform for drawing the adhesive tape in a direction away from the chip. An elevation device is projectable from the platform that is movable both laterally across a surface of the platform and vertically with respect to the platform for elevating the chip. By moving the elevation device across a width of the chip while lifting the chip, controlled lifting of the chip and propagation of delamination between the chip and the adhesive tape may be achieved
公开/授权文献
- EP1596422B1 Apparatus and method for semiconductor chip detachment 公开/授权日:2012-08-01
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