发明公开
EP1666408A4 METAL NANOPARTICLE AND METHOD FOR PRODUCING SAME, LIQUID DISPERSION OF METAL NANOPARTICLE AND METHOD FOR PRODUCING SAME, METAL THIN LINE, METAL FILM AND METHOD FOR PRODUCING SAME
审中-公开
用于生产金属纳米粒子及其制造方法,液体分散金属纳米粒子与过程,细线金属,金属膜及其制造方法
- 专利标题: METAL NANOPARTICLE AND METHOD FOR PRODUCING SAME, LIQUID DISPERSION OF METAL NANOPARTICLE AND METHOD FOR PRODUCING SAME, METAL THIN LINE, METAL FILM AND METHOD FOR PRODUCING SAME
- 专利标题(中): 用于生产金属纳米粒子及其制造方法,液体分散金属纳米粒子与过程,细线金属,金属膜及其制造方法
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申请号: EP04787672申请日: 2004-09-07
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公开(公告)号: EP1666408A4公开(公告)日: 2009-11-25
- 发明人: ATSUKI TSUTOMU , ODA MASAAKI , HAYASHI TOSHIHARU , KIYOSHIMA REIKO
- 申请人: ULVAC INC , JEMCO INC
- 专利权人: ULVAC INC,JEMCO INC
- 当前专利权人: ULVAC INC,JEMCO INC
- 优先权: JP2003317161 2003-09-09
- 主分类号: B82B1/00
- IPC分类号: B82B1/00 ; B01F17/00 ; B01J13/00 ; B01J19/00 ; B22F1/00 ; B22F9/00 ; C09D5/24 ; H01L21/288 ; H01L23/12 ; H01L23/14 ; H01L23/498 ; H01L29/06 ; H05K3/12
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