发明公开
- 专利标题: IC chip mounting method
- 专利标题(中): 安装IC芯片的方法
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申请号: EP05257725.1申请日: 2005-12-15
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公开(公告)号: EP1746651A3公开(公告)日: 2007-04-18
- 发明人: Ishikawa, Naoki , Kira, Hidehiko , Baba, Shunji , Kobayashi, Hiroshi , Kikuchi, Shunichi , Tsuneno, Tatsuro
- 申请人: FUJITSU LIMITED , Fujitsu Frontech Limited
- 申请人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 专利权人: FUJITSU LIMITED,Fujitsu Frontech Limited
- 当前专利权人: FUJITSU LIMITED,Fujitsu Frontech Limited
- 当前专利权人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 代理机构: Fenlon, Christine Lesley
- 优先权: JP2005209965 20050720
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; G06K19/077 ; H01L21/00
摘要:
An IC chip (11) mounting method which mounts two or more IC chips (11) on a base (13), includes: preparing a wafer (10) by mounting a tape (30) on a face thereof, which is the reverse of the wafer (10) having a mounting surface to be attached to the base (13), and by dividing the wafer (10) into IC chips (11) by dicing while leaving the tape (30); positioning the wafer (10) to face the base (13) in such a direction that the mounting surface to be attached to the base (13) faces the base (13); sequentially pressing the IC chips (11) on the wafer (10) against the base (13) and temporarily fixing the IC chips (11) while the base (13) is being fed in a prescribed one-dimensional direction along the wafer (10) and while the wafer (10) is being moved two-dimensionally along the base (13) ; and fixing the IC chips (11) temporarily fixed on the base (13) on the base (13) by heating and pressurizing in a batch manner.
公开/授权文献
- EP1746651B1 IC chip mounting method 公开/授权日:2016-09-28
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