发明公开
EP1780765A2 Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus
有权
级装置，具有用于在这样的设备中处理的样品这样的装置和方法粒子光学设备
- 专利标题： Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus
- 专利标题（中）： 级装置，具有用于在这样的设备中处理的样品这样的装置和方法粒子光学设备
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申请号： EP06123224.5申请日： 2006-10-31
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公开(公告)号： EP1780765A2公开(公告)日： 2007-05-02
- 发明人: Tappel, Hendrik , Hees. van, Ian , Lankers, Danny , Giannuzzi, Lucille , Veen, van, Gerard , Young, Richard
- 申请人： FEI COMPANY
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人： FEI COMPANY
- 当前专利权人： FEI COMPANY
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构： Bakker, Hendrik
- 优先权： EP05110225 20051101
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01L21/68 ; H01J37/30
摘要：
A particle-optical apparatus comprising:
- A first source, for generating a first irradiating beam along a first axis;
- A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
- A stage assembly for positioning a sample in the vicinity of the beam intersection point, provided with:
- A sample table to which the sample can be mounted;
- A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point,
wherein the set of actuators is further arranged to effect:
- rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
- rotation of the sample table about a flip axis substantially perpendicular to the Z-axis,
whereby the flip axis can itself be rotated about the rotation axis.
- A first source, for generating a first irradiating beam along a first axis;
- A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
- A stage assembly for positioning a sample in the vicinity of the beam intersection point, provided with:
- A sample table to which the sample can be mounted;
- A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point,
wherein the set of actuators is further arranged to effect:
- rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
- rotation of the sample table about a flip axis substantially perpendicular to the Z-axis,
whereby the flip axis can itself be rotated about the rotation axis.
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