发明公开

DREHRATENSENSOR
摘要:
The present invention relates to a rotation-rate sensor having a drive mass element (13) which is arranged above a surface of a substrate and can be caused to oscillate by means of a drive device (18) along a first axis (y) which runs along the surface, having a detection mass element (14) which can be deflected under the influence of Coriolis force along a second axis (z) which runs at right angles to the surface, and having a detection device which can detect the deflection of the detection mass element (14) along the second axis (z). The arrangement of the second axis (z) at right angles to the surface allows the rotation-rate sensor to be integrated on a chip together with further rotation-rate sensors which are suitable for detection of rotations about rotation axes in other directions.
公开/授权文献
信息查询
0/0