发明公开
- 专利标题: DREHRATENSENSOR
- 专利标题(英): Rotation-rate sensor
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申请号: EP07729969.1申请日: 2007-06-06
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公开(公告)号: EP2049871A1公开(公告)日: 2009-04-22
- 发明人: HAUER, Joerg , GOMEZ, Udo-Martin , NEUL, Reinhard , KEHR, Kersten , CLASSEN, Johannes , FRANKE, Axel , QUANDER, Marco
- 申请人: Robert Bosch GmbH
- 申请人地址: Postfach 30 02 20 70442 Stuttgart DE
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: Postfach 30 02 20 70442 Stuttgart DE
- 优先权: DE102006035281 20060731; DE102006047135 20061005
- 国际公布: WO2008015044 20080207
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P9/04
摘要:
The present invention relates to a rotation-rate sensor having a drive mass element (13) which is arranged above a surface of a substrate and can be caused to oscillate by means of a drive device (18) along a first axis (y) which runs along the surface, having a detection mass element (14) which can be deflected under the influence of Coriolis force along a second axis (z) which runs at right angles to the surface, and having a detection device which can detect the deflection of the detection mass element (14) along the second axis (z). The arrangement of the second axis (z) at right angles to the surface allows the rotation-rate sensor to be integrated on a chip together with further rotation-rate sensors which are suitable for detection of rotations about rotation axes in other directions.
公开/授权文献
- EP2049871B1 DREHRATENSENSOR 公开/授权日:2013-08-14
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