摘要:
The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, the Coriolis element (2a, 2b) can be stimulated in such a way that it oscillates parallel to a first axis (X); a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is essentially perpendicular to the first axis (X), can be detected; and the first and second axes (X, Y) are parallel to the surface of the substrate. The inventive rotational rate sensor is characterised in that force-mediating means (19, 20) are provided for mediating the action of a force between the substrate and the Coriolis element (2a, 2b).
摘要:
The invention relates to micromechanical spring structure, especially for a rotational speed sensor, comprising a first and a second cooperating spring bars (151, 152) which extend substantially parallel to one another in certain areas and are coupled to one another in certain areas. The first and second spring bars (151, 152) have a common curved area (150) in which they are coupled to one another by means of a connecting area (155). A first transition area (160c; 160d) that leads to the connecting area (155) and is located between the first and the second spring bars (151, 152) substantially extends in a continuously curved manner.
摘要:
The invention relates to a rotational speed sensor comprising a Coriolis element (100) which is arranged on the surface (1) of a substrate. The Coriolis element (100) is excited in order to vibrate parallel to a first axis (X). The Coriolis element (100) is deflected on a second axis (Y) which is perpendicular to the first axis (X) by virtue of Coriolis force. A detection element (140) is provided for detecting said deflection.
摘要:
The invention relates to a micromechanical sensor having at least one movably mounted measuring element positioned opposite of at least one electrode that is disposed in a locally fixed manner, wherein the electrode is disposed in a first plane and is contacted by at least one conductor, which is disposed in a second plane, wherein a third plane comprising an electrically conductive material is positioned between the first plane and the second plane.
摘要:
The invention relates to a yaw rate sensor having a substrate and a plurality of moveable partial structures, which are arranged across a surface of the substrate, wherein the moveable partial structures are coupled to a common, particularly a central spring element, wherein means are provided in order to excite the moveable partial structures to carry out a coupled oscillation in a plane parallel to the surface of the substrate, wherein the moveable partial structures comprise Coriolis elements, wherein means are provided to prove deflections of the Coriolis elements caused by a Coriolis force, wherein a first Coriolis element is provided for detecting a yaw rate about a first axis, wherein a second Coriolis element is provided for detecting a yaw rate about a second axis, the second axis being aligned perpendicular to the first axis.