DREHRATENSENSOR
    2.
    发明公开

    公开(公告)号:EP1478902A1

    公开(公告)日:2004-11-24

    申请号:EP02774413.5

    申请日:2002-09-25

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01C19/56 G01P3/14

    CPC分类号: G01C19/5747

    摘要: The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, the Coriolis element (2a, 2b) can be stimulated in such a way that it oscillates parallel to a first axis (X); a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is essentially perpendicular to the first axis (X), can be detected; and the first and second axes (X, Y) are parallel to the surface of the substrate. The inventive rotational rate sensor is characterised in that force-mediating means (19, 20) are provided for mediating the action of a force between the substrate and the Coriolis element (2a, 2b).

    摘要翻译: 本发明涉及一种旋转速率传感器,其包括衬底和科里奥利元件(2a,2b),所述科里奥利元件(2a,2b)布置在衬底的表面上。 根据本发明,科里奥利元件(2a,2b)可以以平行于第一轴(X)振荡的方式受到刺激; 可以检测由科里奥利力在基本上垂直于第一轴(X)的第二轴(Y)中引起的科里奥利元件(2a,2b)的偏差; 并且第一和第二轴线(X,Y)平行于基板的表面。 本发明的旋转速率传感器的特征在于,提供力介导装置(19,20)用于调节衬底与科里奥利元件(2a,2b)之间的力的作用。

    MIKROMECHANISCHER SENSOR
    9.
    发明公开
    MIKROMECHANISCHER SENSOR 审中-公开
    微机械传感器

    公开(公告)号:EP2331975A1

    公开(公告)日:2011-06-15

    申请号:EP09781412.3

    申请日:2009-08-03

    申请人: Robert Bosch GmbH

    IPC分类号: G01P15/125 G01C19/56 B81B3/00

    摘要: The invention relates to a micromechanical sensor having at least one movably mounted measuring element positioned opposite of at least one electrode that is disposed in a locally fixed manner, wherein the electrode is disposed in a first plane and is contacted by at least one conductor, which is disposed in a second plane, wherein a third plane comprising an electrically conductive material is positioned between the first plane and the second plane.

    DREHRATENSENSOR
    10.
    发明公开
    DREHRATENSENSOR 有权
    旋转速率传感器

    公开(公告)号:EP2208020A1

    公开(公告)日:2010-07-21

    申请号:EP08805011.7

    申请日:2008-10-02

    申请人: Robert Bosch GmbH

    IPC分类号: G01C19/56

    摘要: The invention relates to a yaw rate sensor having a substrate and a plurality of moveable partial structures, which are arranged across a surface of the substrate, wherein the moveable partial structures are coupled to a common, particularly a central spring element, wherein means are provided in order to excite the moveable partial structures to carry out a coupled oscillation in a plane parallel to the surface of the substrate, wherein the moveable partial structures comprise Coriolis elements, wherein means are provided to prove deflections of the Coriolis elements caused by a Coriolis force, wherein a first Coriolis element is provided for detecting a yaw rate about a first axis, wherein a second Coriolis element is provided for detecting a yaw rate about a second axis, the second axis being aligned perpendicular to the first axis.