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公开(公告)号:EP2208020A1
公开(公告)日:2010-07-21
申请号:EP08805011.7
申请日:2008-10-02
申请人: Robert Bosch GmbH
发明人: NEUL, Reinhard , CLASSEN, Johannes , OHMS, Torsten , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , MEISEL, Daniel Christoph , HAUER, Joerg , GOMEZ, Udo-Martin , KEHR, Kersten
IPC分类号: G01C19/56
CPC分类号: G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要: The invention relates to a yaw rate sensor having a substrate and a plurality of moveable partial structures, which are arranged across a surface of the substrate, wherein the moveable partial structures are coupled to a common, particularly a central spring element, wherein means are provided in order to excite the moveable partial structures to carry out a coupled oscillation in a plane parallel to the surface of the substrate, wherein the moveable partial structures comprise Coriolis elements, wherein means are provided to prove deflections of the Coriolis elements caused by a Coriolis force, wherein a first Coriolis element is provided for detecting a yaw rate about a first axis, wherein a second Coriolis element is provided for detecting a yaw rate about a second axis, the second axis being aligned perpendicular to the first axis.
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公开(公告)号:EP2049871B1
公开(公告)日:2013-08-14
申请号:EP07729969.1
申请日:2007-06-06
申请人: Robert Bosch GmbH
发明人: HAUER, Joerg , GOMEZ, Udo-Martin , NEUL, Reinhard , KEHR, Kersten , CLASSEN, Johannes , FRANKE, Axel , QUANDER, Marco
IPC分类号: G01C19/56 , G01C19/5747 , G01C19/5762
CPC分类号: G01C19/5762 , G01C19/5747
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公开(公告)号:EP1682853B1
公开(公告)日:2011-10-12
申请号:EP04762654.4
申请日:2004-08-13
申请人: ROBERT BOSCH GMBH
CPC分类号: G01C19/5755
摘要: The invention relates to a rotational speed sensor comprising the features of the generic part of the main claim. The inventive rotational speed sensor is provided with force-transducing means. The invention is characterized in that the effective force transduced by said means is provided with a certain frequency such that the frequency of the transduced effective force represents an integer multiple of the oscillation frequency of the driving element parallel to the x axis.
摘要翻译: 本发明涉及一种包括主权利要求的一般部分的特征的转速传感器。 本发明的转速传感器设置有力传感装置。 本发明的特征在于,由所述装置转换的有效力被提供一定的频率,使得转换的有效力的频率表示驱动元件的平行于x轴的振荡频率的整数倍。
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公开(公告)号:EP2208020B1
公开(公告)日:2013-08-21
申请号:EP08805011.7
申请日:2008-10-02
申请人: Robert Bosch GmbH
发明人: NEUL, Reinhard , CLASSEN, Johannes , OHMS, Torsten , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , MEISEL, Daniel Christoph , HAUER, Joerg , GOMEZ, Udo-Martin , KEHR, Kersten
IPC分类号: G01C19/574
CPC分类号: G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
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公开(公告)号:EP2049871A1
公开(公告)日:2009-04-22
申请号:EP07729969.1
申请日:2007-06-06
申请人: Robert Bosch GmbH
发明人: HAUER, Joerg , GOMEZ, Udo-Martin , NEUL, Reinhard , KEHR, Kersten , CLASSEN, Johannes , FRANKE, Axel , QUANDER, Marco
CPC分类号: G01C19/5762 , G01C19/5747
摘要: The present invention relates to a rotation-rate sensor having a drive mass element (13) which is arranged above a surface of a substrate and can be caused to oscillate by means of a drive device (18) along a first axis (y) which runs along the surface, having a detection mass element (14) which can be deflected under the influence of Coriolis force along a second axis (z) which runs at right angles to the surface, and having a detection device which can detect the deflection of the detection mass element (14) along the second axis (z). The arrangement of the second axis (z) at right angles to the surface allows the rotation-rate sensor to be integrated on a chip together with further rotation-rate sensors which are suitable for detection of rotations about rotation axes in other directions.
摘要翻译: 本发明涉及一种具有驱动质量元件(13)的转速传感器,该驱动质量元件布置在基板的表面上方并且可以通过驱动装置(18)沿第一轴线(y)振动,该第一轴线 沿着表面延伸,具有能够在科里奥利力的影响下沿着与表面成直角延伸的第二轴(z)偏转的检测质量元件(14),并且具有检测装置,该检测装置能够检测 沿第二轴线(z)的检测质量元件(14)。 与表面成直角的第二轴线(z)的布置允许旋转速率传感器与另外的旋转速率传感器一起集成在芯片上,所述另外的旋转速度传感器适于检测围绕其他方向的旋转轴线的旋转。
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公开(公告)号:EP2106551A2
公开(公告)日:2009-10-07
申请号:EP07822570.3
申请日:2007-11-14
申请人: Robert Bosch GmbH
IPC分类号: G01P15/125
CPC分类号: G01P15/18 , G01P15/125 , G01P2015/084
摘要: The invention relates to a micromechanic acceleration sensor, comprising a substrate (1), an elastic membrane (5), which extends in parallel to the substrate plane, is partially connected to the substrate and comprises a surface region, which can be deflected perpendicular to the substrate plane. The invention further comprises a seismic mass (6), wherein the center of gravity thereof is outside of the plane of the elastic membrane (5). The seismic mass (6) extends at a distance across substrate regions, which are located outside of the region of the elastic membrane (5) and comprise an arrangement made of a plurality of electrodes (3a, 3b, 3c, 3d), which form a capacitor with opposing regions of the seismic mass (6) in a circuit. In the central region, the seismic mass (6) is fastened in the surface region of the elastic membrane (5), which can be deflected perpendicular to the substrate plane, to the elastic membrane (5).
摘要翻译: 传感器具有平行于衬底平面延伸的弹性膜(5),与衬底(1)连接,其中膜包括垂直于平面移动的平面区域。 震动块(6),其旋转点位于膜的平面之外,其中基底区域位于膜的平面区域的外侧。 地震质量被固定在膜的平面区域的中心区域。 一组电极(3a,3c)以电路技术方式形成具有相对于地震块的区域的冷凝器。
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公开(公告)号:EP1682853A1
公开(公告)日:2006-07-26
申请号:EP04762654.4
申请日:2004-08-13
申请人: ROBERT BOSCH GMBH
CPC分类号: G01C19/5755
摘要: The invention relates to a rotational speed sensor comprising the features of the generic part of the main claim. The inventive rotational speed sensor is provided with force-transducing means. The invention is characterized in that the effective force transduced by said means is provided with a certain frequency such that the frequency of the transduced effective force represents an integer multiple of the oscillation frequency of the driving element parallel to the x axis.
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公开(公告)号:EP2106551B1
公开(公告)日:2017-06-28
申请号:EP07822570.3
申请日:2007-11-14
申请人: Robert Bosch GmbH
IPC分类号: G01P15/08 , G01P15/18 , G01P15/125
CPC分类号: G01P15/18 , G01P15/125 , G01P2015/084
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公开(公告)号:EP2210060A1
公开(公告)日:2010-07-28
申请号:EP07822375.7
申请日:2007-11-08
申请人: Robert Bosch GmbH
发明人: NEUL, Reinhard , CLASSEN, Johannes , GRACKI, Sebastian , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , KEHR, Kersten , GERHARDT, Christian
CPC分类号: G01C19/5712
摘要: The invention relates to a yaw rate sensor, comprising a substrate (10), a bearing (20), an oscillating structure (40), which by means of springs (30) is rotatably suspended on the bearing (20) in order to perform a planar driving oscillating movement, and drive means for producing a planar driving oscillating movement of the oscillating structure (40). The essence of the invention is that the yaw rate sensor comprises first evaluation means for detecting a rotation in a first rotational axis and second evaluation means for detecting a rotation in a second rotational axis.
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