发明公开
EP2226368A1 COMPOSITION FOR FORMING ALUMINUM FILM AND METHOD FOR FORMING ALUMINUM FILM 审中-公开
成分用于形成铝层和方法形成的铝膜

COMPOSITION FOR FORMING ALUMINUM FILM AND METHOD FOR FORMING ALUMINUM FILM
摘要:
A composition for forming an aluminum film, comprising a complex represented by the following formula (1) and a complex represented by the following formula (2), the molar ratio of the complex represented by the following formula (1) and the complex represented by the following formula (2) being 40:60 to 85:15: AlH 3 ⋅ NR 1 ⁢ R 2 ⁢ R 3 AlH 3 ⋅ NR 1 ⁢ R 2 ⁢ R 3 2
(in the above formulas (1) and (2), R 1 , R 2 and R 3 are each independently a hydrogen atom, alkyl group, cycloalkyl group, alkenyl group, alkynyl group, aryl group or aralkyl group.) .
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