COMPOSITION FOR FORMING ALUMINUM FILM AND METHOD FOR FORMING ALUMINUM FILM
    1.
    发明公开
    COMPOSITION FOR FORMING ALUMINUM FILM AND METHOD FOR FORMING ALUMINUM FILM 审中-公开
    成分用于形成铝层和方法形成的铝膜

    公开(公告)号:EP2226368A1

    公开(公告)日:2010-09-08

    申请号:EP08865378.7

    申请日:2008-12-24

    申请人: JSR Corporation

    摘要: A composition for forming an aluminum film, comprising a complex represented by the following formula (1) and a complex represented by the following formula (2), the molar ratio of the complex represented by the following formula (1) and the complex represented by the following formula (2) being 40:60 to 85:15: AlH 3 ⋅ NR 1 ⁢ R 2 ⁢ R 3 AlH 3 ⋅ NR 1 ⁢ R 2 ⁢ R 3 2
    (in the above formulas (1) and (2), R 1 , R 2 and R 3 are each independently a hydrogen atom, alkyl group, cycloalkyl group, alkenyl group, alkynyl group, aryl group or aralkyl group.) .

    摘要翻译: 一种用于形成在铝上的电影,包括由下式表示的复合物(1)和由下式表示的配合物(2),由下式表示的配合物的摩尔比(1),并通过所示的络合物组合物 下述式(2)是40:60〜85:15:3的AlH <¢NR 1 R 2 R 3 3的AlH¢<¢NR 1个R 2 R 3¢2((在上述式1) 和(2)中,R 1,R 2和R 3各自独立地为氢原子,烷基,环烷基,烯基,炔基,芳基或芳烷基。)。