发明公开
EP2331733A2 VORRICHTUNG UND VERFAHREN ZUM GALVANISIEREN VON SUBSTRATEN IN PROZESSKAMMERN
审中-公开
装置及方法的工艺室电镀SUBSTRATES
- 专利标题: VORRICHTUNG UND VERFAHREN ZUM GALVANISIEREN VON SUBSTRATEN IN PROZESSKAMMERN
- 专利标题(英): Device and method for electroplating substrates in process chambers
- 专利标题(中): 装置及方法的工艺室电镀SUBSTRATES
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申请号: EP09777348.5申请日: 2009-07-21
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公开(公告)号: EP2331733A2公开(公告)日: 2011-06-15
- 发明人: REUSTLE, Peter , GUTEKUNST, Mathias
- 申请人: RENA GmbH
- 申请人地址: Ob der Eck 5 78148 Gütenbach DE
- 专利权人: RENA GmbH
- 当前专利权人: RENA GmbH
- 当前专利权人地址: Ob der Eck 5 78148 Gütenbach DE
- 代理机构: Stürken, Joachim
- 优先权: DE102008045260 20080901
- 国际公布: WO2010022825 20100304
- 主分类号: C25D17/12
- IPC分类号: C25D17/12 ; C25D17/00 ; H01L31/18 ; C25D17/02 ; H05K3/24
摘要:
The invention relates to the electroplating of substrates for use as e.g. wafers, solar cells or hybrids in process chambers or cups having soluble or insoluble anodes and an electrolyte (8), which is conducted through the process chamber in a circuit. The invention also relates to the stripping of contacts that are metallised during the electroplating process. Two electrolytic operating conditions are produced in the process chamber, i.e. electroplating and stripping. The invention optimises these two operating conditions using one modular unit (2), substantially consisting of an anode carrier (3) and at least one liquid-permeable material (5) as the diffuser (5). For the electroplating process, a homogeneous stream of the electrolyte (8) is required in the process chamber in the vicinity of the product (1) to be electroplated. This is achieved by a corresponding adjustment of the static pressure below the diffuser (5) and as a result of the permeability characteristics of the latter with regard to the electrolyte. The volumetric flow of electrolyte (8) is increased during the stripping of the product supports which act as the electrical contact. The flow passes through the clearance zone (4) and then predominantly directly through the diffuser (5) that lies above the clearance zone (4). As a result, different flow speeds are present over the cross-section of the process chamber. This causes turbulence with wave formation on the surface of the electrolyte. Without the presence of a product, the electrolyte washes over the product supports, rapidly stripping the contacts completely with a high flow density.
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