发明公开
- 专利标题: Simultaneous electron detection
- 专利标题(中): 同步电子邮件
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申请号: EP10163505.0申请日: 2010-05-21
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公开(公告)号: EP2388796A1公开(公告)日: 2011-11-23
- 发明人: Tiemeijer, Peter , Freitag, Bert , Lazar, Sorin
- 申请人: FEI Company
- 申请人地址: 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构: Bakker, Hendrik
- 主分类号: H01J37/28
- IPC分类号: H01J37/28 ; H01J37/05
摘要:
The invention provides multiple detectors (334,426;340,420,502,826L,702) that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism (322,412) that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one (334,426) of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.
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