公开(公告)号：EP2690648A1

公开(公告)日：2014-01-29

申请号：EP12178060.5

申请日：2012-07-26

申请人： FEI COMPANY

发明人： Foord, David ,  Miller, Thomas ,  Routh, Brian ,  Tiemeijer, Peter ,  Janssen, Bart ,  Lazic, Ivan

IPC分类号： H01J37/305 ,  H01J37/26 ,  H01J37/295

CPC分类号： H01J37/28 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/26 ,  H01J37/295 ,  H01J37/3056 ,  H01J2237/2067 ,  H01J2237/208 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2611 ,  H01J2237/2614 ,  H01J2237/31749

摘要： The invention relates to a method of preparing and imaging a sample (101) using a particle-optical apparatus ( 100 ), equipped with an electron column (120) and an ion beam column (140), a camera system (110), a manipulator (160)
the method comprising the steps of
Deriving a first ptychographic image of the sample from a first electron image,
then thinning the sample, and forming a second ptychographic image of the sample.
In an embodiments of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning, In yet another embodiment the inner potential of the sample is determined and dopant concentrations are determined.

摘要翻译： 本发明涉及一种使用配有电子柱（120）和离子束（140）的粒子光学装置（100）制备和成像样品（101）的方法，相机系统（110）， 操纵器（160），该方法包括以下步骤：从第一电子图像中导出样品的第一ptychographic图像，然后使样品变薄，并形成样品的第二ptychographic图像。 在本发明的一个实施例中，用于第二图像的种子图像是第一个ptychografic图像。 在另一个实施方案中，第二ptychographic图像是在稀化期间去除的层的图像。在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。

公开(公告)号：EP2400522A1

公开(公告)日：2011-12-28

申请号：EP10167258.2

申请日：2010-06-24

申请人： FEI COMPANY

发明人： Tiemeijer, Peter ,  Buijsse, Bart

IPC分类号： H01J37/09 ,  H01J37/26

CPC分类号： H01J37/263 ,  H01J37/09 ,  H01J2237/043 ,  H01J2237/223 ,  H01J2237/2614 ,  H01J2237/2802

摘要： The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.

摘要翻译： 本发明涉及一种放置在TEM的衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，以及用于高频的正常显微镜的对比度传递函数。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。

公开(公告)号：EP3364442A1

公开(公告)日：2018-08-22

申请号：EP18155216.7

申请日：2018-02-06

申请人： FEI Company

发明人： Mohammadi-Gheidari, Ali ,  Mele, Luigi ,  Tiemeijer, Peter ,  Veen, van, Gerard ,  Slingerland, Hendrik

IPC分类号： H01J37/24

CPC分类号： H01J37/222 ,  H01J37/20 ,  H01J37/243 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24535

摘要： A method of operating a charged particle microscope comprising the following steps:
- Providing a specimen on a specimen holder;
- Using a source to produce a beam of charged particles that is subject to beam current fluctuations;
- Employing a beam current sensor, located between said source and specimen holder, to intercept a part of the beam and produce an intercept signal proportional to a current of the intercepted part of the beam, the beam current sensor comprising a hole arranged to pass a beam probe with an associated probe current;
- Scanning said probe over the specimen, thereby irradiating the specimen with a specimen current, with a dwell time associated with each scanned location on the specimen;
- Using a detector to detect radiation emanating from the specimen in response to irradiation by said probe, and producing an associated detector signal;
- Using said intercept signal as input to a compensator to suppress an effect of said current fluctuations in said detector signal,
wherein:
- The beam current sensor is configured as a semiconductor device with a sensing layer that is oriented toward the source, in which:
▪ Each charged particle of said intercepted part of the beam generates electron/hole pairs in said sensing layer;
▪ Generated electrons are drawn to an anode of the semiconductor device;
▪ Generated holes are drawn to a cathode of the semiconductor device,
thereby producing said intercept signal.

公开(公告)号：EP2993683B1

公开(公告)日：2017-04-26

申请号：EP15183309.2

申请日：2015-09-01

申请人： FEI Company

发明人： De Jong, Erwin ,  Lazar, Sorin ,  Tiemeijer, Peter ,  Geurink, Rudolf

IPC分类号： H01J37/05 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/226 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/15 ,  H01J2237/2007 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2802

公开(公告)号：EP2998979A1

公开(公告)日：2016-03-23

申请号：EP14185799.5

申请日：2014-09-22

申请人： FEI COMPANY

发明人： De Jong, Erwin ,  Lazar, Sorin ,  Tiemeijer, Peter ,  Geurink, Rudolf

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/05 ,  H01J37/20 ,  H01J37/21 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/0455 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/2802

摘要： A Transmission Charged-Particle Microscope, comprising:
- A specimen holder, for holding a specimen;
- A source, for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- An imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising:
▪ A dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis;
▪ A detector,
wherein the spectroscopic apparatus comprises an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector, which aperture is delimited in a dispersion direction perpendicular to said propagation axis by first and second opposed edges, each of which edges is independently positionable relative to said propagation axis, thereby allowing independent adjustment of both of:
- A width of said aperture parallel to said dispersion direction; and
- A position of a center of said aperture relative to said propagation axis.

摘要翻译： 透射带电粒子显微镜，包括： - 用于保持样品的样品架; - 用于生产带电粒子束的源头; - 照明器，用于引导所述光束以照射所述样本; - 成像系统，用于将通过所述样本传输的带电粒子的通量引导到分光装置，所述分光装置包括： - 一种分散装置，用于将所述通量分散到基本上平行于传播轴传播的光谱子束的能量分辨阵列 ; - 一种检测器，其中所述分光装置包括用于限定所述阵列的路径中的孔径的可调节孔径装置，以便选择要进入所述检测器的所述阵列的子集，所述孔径沿着垂直方向的分散方向限定 通过第一和第二相对边缘到所述传播轴，每个边缘相对于所述传播轴独立地定位，从而允许独立调整以下两者： - 平行于所述分散方向的所述孔的宽度; 以及 - 所述孔的中心相对于所述传播轴的位置。

公开(公告)号：EP2690648B1

公开(公告)日：2014-10-15

申请号：EP12178060.5

申请日：2012-07-26

申请人： FEI COMPANY

发明人： Foord, David ,  Miller, Thomas ,  Routh, Brian ,  Tiemeijer, Peter ,  Janssen, Bart ,  Lazic, Ivan

IPC分类号： H01J37/305 ,  H01J37/26 ,  H01J37/295

CPC分类号： H01J37/28 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/26 ,  H01J37/295 ,  H01J37/3056 ,  H01J2237/2067 ,  H01J2237/208 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2611 ,  H01J2237/2614 ,  H01J2237/31749

摘要： The invention relates to a method of preparing and imaging a sample (101) using a particle-optical apparatus ( 100 ), equipped with an electron column (120) and an ion beam column (140), a camera system (110), a manipulator (160) the method comprising the steps of Deriving a first ptychographic image of the sample from a first electron image, then thinning the sample, and forming a second ptychographic image of the sample. In an embodiments of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning, In yet another embodiment the inner potential of the sample is determined and dopant concentrations are determined.

公开(公告)号：EP2400523B1

公开(公告)日：2013-12-11

申请号：EP11171115.6

申请日：2011-06-23

申请人： FEI Company

发明人： Tiemeijer, Peter ,  Buijsse, Bart

IPC分类号： H01J37/09 ,  H01J37/26

CPC分类号： H01J37/263 ,  H01J37/09 ,  H01J2237/043 ,  H01J2237/223 ,  H01J2237/2614 ,  H01J2237/2802

公开(公告)号：EP2485240A2

公开(公告)日：2012-08-08

申请号：EP12153986.0

申请日：2012-02-06

申请人： FEI Company

发明人： Buijsse, Bart ,  Tiemeijer, Peter ,  Bierhoff, Mart

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  H01J37/265 ,  H01J2237/1501 ,  H01J2237/2614

摘要： The invention relates to a method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM), the TEM (500) equipped with an objective lens (512) for guiding a beam of electrons to a sample (508) and the TEM showing a diffraction plane (514) in which at least a beam of unscattered electrons is focused, the TEM equipped with a structure (518,410) to enhance the Contrast Transfer Function (CTF), said structure situated in the diffraction plane or an image thereof, the method comprising adjusting or aligning the optical elements, characterized in that irradiation with unscattered electrons of the structure during said adjusting or aligning is prevented (602) by deflecting the beam of unscattered electrons away from the structure.
The structure to enhance the CTF can, for example, be a phase plate, a single side band device, or a 'tulip' (410).
In a preferred embodiment of the method the optical element to be aligned is the phase enhancing structure itself.

公开(公告)号：EP3065160A1

公开(公告)日：2016-09-07

申请号：EP15192573.2

申请日：2015-11-02

申请人： FEI Company

发明人： Henstra, Alexander ,  Tiemeijer, Peter

IPC分类号： H01J37/05 ,  H01J37/26

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/14 ,  H01J37/22 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2802

摘要： The invention relates to a post-column filter (a PCF) for a (Scanning) Transmission Electron Microscope (a (S)TEM). Traditionally these filters use excitations of the optical elements before the slit plane that are identical in both the EFTEM and the EELS mode. Although this eases the task for the person skilled in the art of developing and tuning a PCF, as it reduces the number of degrees of freedom to a manageable amount. Inventors found ways to determine settings of the optical elements before the slit plane for EELS mode that are different from the EFTEM mode and where the performance of the PCF in EELS mode is improved (especially the relative energy range that can be imaged) without degrading the performance of the PCF in EFTEM mode.

摘要翻译： 本发明涉及一种用于（扫描）透射电子显微镜（（S）TEM）的柱后过滤器（PCF）。 传统上，这些滤光片在EFTEM和EELS模式之间相同的狭缝平面之前使用光学元件的激发。 尽管这样可以减轻开发和调整PCF的技术熟练人员的任务，因为它将自由度减少到可管理的数量。 发明人发现了确定EELS模式的狭缝平面与EFTEM模式不同的光学元件的设置方式，并且改善了EELS模式下PCF的性能（特别是可以成像的相对能量范围），而不会降低 PCF在EFTEM模式下的性能。

公开(公告)号：EP2838108A1

公开(公告)日：2015-02-18

申请号：EP13180022.9

申请日：2013-08-12

申请人： FEI COMPANY

发明人： Tiemeijer, Peter ,  Henstra, Alexander ,  Konings, Stan

IPC分类号： H01J37/26

CPC分类号： H01J37/261 ,  H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/006 ,  H01J2237/2605 ,  H01J2237/262

摘要： An Environmental Transmission Electron Microscope suffers from gas-induced resolution deterioration. It is found that this deterioration was not a function of the current density on the sample, but of the total current of the beam of electrons. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample 114 with respect to the sample chamber 138. A bias voltage of 100 V applied via voltage source 144 is sufficient for a marked improvement the gas-induced resolution deterioration. Polarization is not important. Alternatively an electric field perpendicular to the optical axis 104 can be used, for example by placing an electrically biased wire or gauze 154 off-axis in the sample chamber.

摘要翻译： 环境透射电子显微镜遭受气体分解降解。 发现这种劣化不是样品上的电流密度，而是电子束的总电流的函数。 发明人得出结论，劣化是由于ETEM的样品室中的气体的离子化，并且建议在样品室中使用电场来去除电离气体，从而减少气体诱导的分辨率劣化。 电场不需要是强场，并且可以由例如相对于样品室138偏置样品114引起。经由电压源144施加的100V的偏置电压足以显着改善气体 引起分辨率恶化。 极化并不重要。 或者，可以使用垂直于光轴104的电场，例如通过将偏置电线或纱布154离轴放置在样品室中。