发明公开
- 专利标题: DRUCKSENSOR, INSBESONDERE DIFFERENZDRUCKSENSOR, MIT MEMBRANBETT
- 专利标题(英): Pressure sensor, especially differential pressure sensor, comprising a membrane bed
- 专利标题(中): 压力传感器,有膜床特别差压传感器
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申请号: EP10762673.1申请日: 2010-10-07
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公开(公告)号: EP2494326A1公开(公告)日: 2012-09-05
- 发明人: KOBER, Timo , PHILIPPS, Michael , STOLZE, Dieter , THAM, Anh, Tuan , WERTHSCHÜTZKY, Roland
- 申请人: Endress+Hauser GmbH+Co. KG
- 申请人地址: Hauptstrasse 1 79689 Maulburg DE
- 专利权人: Endress+Hauser GmbH+Co. KG
- 当前专利权人: Endress+Hauser GmbH+Co. KG
- 当前专利权人地址: Hauptstrasse 1 79689 Maulburg DE
- 代理机构: Andres, Angelika Maria
- 优先权: DE102009046229 20091030
- 国际公布: WO2011051089 20110505
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L19/06
摘要:
The pressure sensor according to the invention comprises at least one base, at least one measuring membrane (30), and a transducer, the measuring membrane comprising a semiconductor material and the measuring membrane being fastened to the base, enclosing a pressure chamber. At least one pressure value can be applied to the measuring membrane and the membrane is elastically deformable depending on said pressure value. The transducer provides an electrical signal depending on the deformation of the measuring membrane. The base comprises a membrane bed on which the measuring membrane rests in the event of an overload in order to support the measuring membrane. The membrane bed (21) comprises a glass layer (20) the surface of which faces the measuring membrane and defines a wall of the pressure chamber, the surface of the glass layer having a contour which is suitable for supporting the measuring membrane (30) in the event of an overload. The invention is characterized in that the contour of the membrane bed (21) is obtained by subjecting an unsupported section of a glass pane which forms the glass layer to an increased temperature and allowing it to sag due to the gravity of the unsupported section of the glass pane and by subsequent cooling of the glass pane.
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