发明公开
EP2577325A1 DISPOSITIF DE CARACTÉRISATION TOPOGRAPHIQUE ET DE CARTOGRAPHIE CHIMIQUE DE SURFACES
审中-公开
VORRICHTUNGFÜRTOPOGRAFISCHE CHARAKTERISIERUNG UND CHEMISCHE KARTIERUNG VONOBERFLÄCHEN
- 专利标题： DISPOSITIF DE CARACTÉRISATION TOPOGRAPHIQUE ET DE CARTOGRAPHIE CHIMIQUE DE SURFACES
- 专利标题（英）： Device for topographical characterisation and chemical mapping of surfaces
- 专利标题（中）： VORRICHTUNGFÜRTOPOGRAFISCHE CHARAKTERISIERUNG UND CHEMISCHE KARTIERUNG VONOBERFLÄCHEN
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申请号： EP11729731.7申请日： 2011-06-01
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公开(公告)号： EP2577325A1公开(公告)日： 2013-04-10
- 发明人: TONNEAU, Didier , PURANS, Juris , FAUQUET, Carole , JANDARD, Franck , ERKO, Alexei , BJEOUMIKHOV, Aniouar
- 申请人： Centre National de la Recherche Scientifique , Université de la Méditerranée - Aix-Marseille II
- 申请人地址： 3 rue Michel Ange 75016 Paris FR
- 专利权人： Centre National de la Recherche Scientifique,Université de la Méditerranée - Aix-Marseille II
- 当前专利权人： Centre National de la Recherche Scientifique,Université de la Méditerranée - Aix-Marseille II
- 当前专利权人地址： 3 rue Michel Ange 75016 Paris FR
- 代理机构： Priori, Enrico
- 优先权： FR1002392 20100607
- 国际公布： WO2011154877 20111215
- 主分类号： G01Q30/02
- IPC分类号： G01Q30/02 ; G01Q60/06 ; G01Q60/20 ; G01Q60/22 ; G01N23/223 ; G21K7/00 ; B82Y35/00
摘要：
The invention relates to a device for characterising surfaces, characterised in that said device includes: a so-called imaging capillary (C
1 ) for guiding near- or medium-infrared, visible, ultraviolet or X-ray electromagnetic radiation from or towards a surface (SE) to be characterised, said capillary having one so-called front end (EA
C1 ), pointing towards said surface and having an opening having a micrometric or sub-micrometric diameter; and a micromechanical oscillator (DP) for inducing an oscillatory motion of said capillary relative to said surface. The invention further relates to the use of such a device for simultaneously acquiring topographic information and spatially resolved spectroscopic information on a surface to be characterised.
1 ) for guiding near- or medium-infrared, visible, ultraviolet or X-ray electromagnetic radiation from or towards a surface (SE) to be characterised, said capillary having one so-called front end (EA
C1 ), pointing towards said surface and having an opening having a micrometric or sub-micrometric diameter; and a micromechanical oscillator (DP) for inducing an oscillatory motion of said capillary relative to said surface. The invention further relates to the use of such a device for simultaneously acquiring topographic information and spatially resolved spectroscopic information on a surface to be characterised.
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