公开(公告)号：EP3837536B1

公开(公告)日：2025-02-12

申请号：EP19849813.1

申请日：2019-08-15

Inventor： ROACH, Gregory John

IPC: G01N23/223

公开(公告)号：EP4439061A3

公开(公告)日：2024-12-25

申请号：EP24187543.4

申请日：2020-08-27

Applicant: PRATT & WHITNEY CANADA CORP.

Inventor： JEAN, Maurice ,  SAVARD, Nathalie ,  SEVIGNY, Sonia ,  PRONOVOST, Stephanie

IPC: G01N23/223 ,  G01M15/10 ,  G01N33/00 ,  G01N33/28

Abstract: Systems and methods are provided for determining an exposure temperature in an engine. One or more particles (124) filtered from lubrication fluid of an engine may be analyzed. The chemical composition of filtered particles (124) may be compared to reference data (134) which includes a relationship between chemical composition and exposure temperature. An estimate of the exposure temperature may be determined. An output (130) may be generated based on the exposure temperature.

公开(公告)号：EP4474804A1

公开(公告)日：2024-12-11

申请号：EP22924090.8

申请日：2022-11-29

Applicant: Canon Anelva Corporation

Inventor： TSUKAMOTO, Takeo

IPC: G01N23/223 ,  G01N23/04 ,  G01N23/2206

Abstract: An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

公开(公告)号：EP4474803A1

公开(公告)日：2024-12-11

申请号：EP22924089.0

申请日：2022-11-29

Applicant: Canon Anelva Corporation

Inventor： TSUKAMOTO, Takeo

IPC: G01N23/223 ,  G01N23/04 ,  G01N23/2206

Abstract: An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.

公开(公告)号：EP4474800A1

公开(公告)日：2024-12-11

申请号：EP22923964.5

申请日：2022-03-31

Applicant: Canon Anelva Corporation

Inventor： TSUKAMOTO, Takeo

IPC: G01N23/223 ,  G01N23/04 ,  G01N23/2206

Abstract: An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

公开(公告)号：EP4166938B1

公开(公告)日：2024-08-14

申请号：EP21825575.0

申请日：2021-03-24

IPC: G01N23/2209 ,  G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/32120130101

公开(公告)号：EP3620779B1

公开(公告)日：2024-07-31

申请号：EP19188797.5

申请日：2019-07-29

IPC: G01N23/223 ,  H01L21/306 ,  H01L21/66

CPC classification number: G01N2223/63320130101 ,  G01N2223/611620130101 ,  G01N2223/07620130101 ,  G01N23/223 ,  H01L22/12 ,  H01L21/30604 ,  H01L21/30612

公开(公告)号：EP4276452B1

公开(公告)日：2024-07-03

申请号：EP22173365.2

申请日：2022-05-13

IPC: G01N23/223

CPC classification number: G01N23/223

公开(公告)号：EP4384803A1

公开(公告)日：2024-06-19

申请号：EP22783392.8

申请日：2022-08-22

Applicant: X Development LLC

Inventor： MURPHY, Gearoid ,  HOLIDAY, Alexander ,  BANATAO, Diosdado ,  ZHAO, Allen Richard ,  BADHWAR, Shruti

IPC: G01N21/3563 ,  G01N21/359 ,  G01J3/36 ,  G01J3/00 ,  G06V10/58 ,  H04N5/33 ,  G01N23/223 ,  G01N21/3581 ,  G01N21/65 ,  G01N21/71 ,  G01N21/90 ,  G01N21/35 ,  G01N21/84 ,  G01J3/28 ,  B07C5/342

CPC classification number: G01N21/3563 ,  G01N21/359 ,  G01N2021/84520130101 ,  G01N21/90 ,  G01N2021/359520130101 ,  G01N2201/129620130101 ,  G01N21/718 ,  G01N21/65 ,  G01N21/3581 ,  G06V10/58 ,  B07C5/342 ,  H04N23/11 ,  G06V2201/0620220101 ,  G06V10/82 ,  G06V10/143 ,  G01J3/2823 ,  G01J3/28

公开(公告)号：EP3859320B1

公开(公告)日：2024-03-13

申请号：EP19867600.9

申请日：2019-06-19

Inventor： AOKI, Yu ,  INOUE, Tatsuya ,  FUJIMURA, Seiji ,  KITA, Hiroaki

IPC: G01N23/223 ,  G01J4/04