发明公开
- 专利标题： Catalyst synthesis for organosilane sol-gel reactions
- 专利标题（中）： 有机硅烷溶胶凝胶
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申请号： EP13159800.5申请日： 2013-03-18
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公开(公告)号： EP2639331A2公开(公告)日： 2013-09-18
- 发明人: Xiao, Manchao , Pearlstein, Ronald Martin , Derecskei-Kovacs, Agnes , Lei, Xinjian , Ho, Richard , O'Neill, Mark Leonard , Spence, Daniel P. , Mayorga, Steven Gerard
- 申请人： AIR PRODUCTS AND CHEMICALS, INC.
- 申请人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 代理机构： Muir, Benjamin M. J.
- 优先权： US201261611808P 20120316; US201313795636 20130312
- 主分类号： C23C18/12
- IPC分类号： C23C18/12 ; C07F7/08 ; C07F7/12 ; C07F7/18
摘要：
A formulation comprising a first organosilane precursor, optionally a halogenation reagent, and a second organosilane precursor are described. At least a portion or all of the halogenation reagent may react with the first organosilane precursor to provide the second organosilane precursor. Methods of generating such formulation in situ from readily available pure materials are also provided. Further provided are methods of using the formulations as the precursor for a flowable vapor deposition process.
公开/授权文献
- EP2639331A3 Catalyst synthesis for organosilane sol-gel reactions 公开/授权日：2014-04-09
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