发明公开
- 专利标题: Thermal diffusion chamber with convection compressor
- 专利标题(中): 带对流式压缩机的热扩散室
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申请号: EP14159571.0申请日: 2014-03-13
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公开(公告)号: EP2778587A1公开(公告)日: 2014-09-17
- 发明人: Erickson, Mark R. , Poole, Henry J. , Jamshidi, Nader , Custer, III, Arthur W. , Dingus, Aaron L.
- 申请人: Poole Ventura, Inc.
- 申请人地址: 800 N. Del Norte Blvd. Oxnard, CA 93730 US
- 专利权人: Poole Ventura, Inc.
- 当前专利权人: Poole Ventura, Inc.
- 当前专利权人地址: 800 N. Del Norte Blvd. Oxnard, CA 93730 US
- 代理机构: Walker, Ross Thomson
- 优先权: US201313803726 20130314
- 主分类号: F27B5/04
- IPC分类号: F27B5/04 ; F27B5/14 ; F27B5/18 ; F27B17/00 ; F27D19/00 ; F27D21/00 ; F28C3/00 ; F28D1/047 ; F28F1/32 ; H01L21/67 ; H01L21/677 ; F28D21/00
摘要:
Preferably, a frame supporting a containment chamber, with a sealed process chamber confined within the containment chamber, and at least one fluid inlet structure in fluidic communication with an exterior of the sealed process chamber, the fluid inlet structure including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber; and an open loop fluid convection system in fluidic communication with an interior of the sealed process chamber, wherein the fluid convection system includes a rotary compressor assembly that extends into the sealed process chamber is disclosed.
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