发明公开
- 专利标题: METHOD FOR COMBINED THROUGH-HOLE PLATING AND VIA FILLING
- 专利标题(中): 程序通孔和接触孔填充联合
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申请号: EP12805956.5申请日: 2012-11-27
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公开(公告)号: EP2796019A1公开(公告)日: 2014-10-29
- 发明人: MIRKOVIC, Marko , KLOBUS, Marcin , TONG, Terry , CHEN, Ted , TANG, Tiger , MOSER, Christoph
- 申请人: Atotech Deutschland GmbH
- 申请人地址: Erasmusstraße 20 10553 Berlin DE
- 专利权人: Atotech Deutschland GmbH
- 当前专利权人: Atotech Deutschland GmbH
- 当前专利权人地址: Erasmusstraße 20 10553 Berlin DE
- 代理机构: Wonnemann, Jörg
- 优先权: CN201110463131 20111221
- 国际公布: WO2013092131 20130627
- 主分类号: H05K3/42
- IPC分类号: H05K3/42 ; C25D3/38 ; C25D5/18 ; H01L21/288 ; C23C18/16
摘要:
The present invention relates to a method for copper electroplating in the manufacture of printed circuit boards, IC substrates and the like. Said method is suitable for a combined conformal through-hole (5) filling and filling of blind micro vias (6). The method utilizes a metal redox system and pulse reverse plating and involves a multilayer laminate comprising a dielectric core layer (1) having an inner copper layer (3), a dielectric outer layer (2) and an outer copper layer (4). A first copper layer (7) is formed by flash plating then copper (8) is electroplated by pulse reverse plating.
公开/授权文献
- EP2796019B1 METHOD FOR COMBINED THROUGH-HOLE PLATING AND VIA FILLING 公开/授权日:2017-01-04
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