发明公开
- 专利标题: PRESSURE SENSOR
- 专利标题(中): DRUCKSENSOR
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申请号: EP13785081.4申请日: 2013-03-19
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公开(公告)号: EP2846143A1公开(公告)日: 2015-03-11
- 发明人: SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , SHINOHARA Yoko , UCHIYAMA Takeshi , OUMI Manabu , SHINOGI Masataka
- 申请人: Seiko Instruments Inc. , The University of Tokyo
- 申请人地址: 8, Nakase 1-chome Mihama-ku Chiba-shi, Chiba 261-8507 JP
- 专利权人: Seiko Instruments Inc.,The University of Tokyo
- 当前专利权人: Seiko Instruments Inc.,The University of Tokyo
- 当前专利权人地址: 8, Nakase 1-chome Mihama-ku Chiba-shi, Chiba 261-8507 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2012105306 20120502
- 国际公布: WO2013164927 20131107
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L13/06 ; H01L29/84
摘要:
A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f LOW (Hz) defined by Expression (1), where a width (µm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. f LOW = k ⋅ G 2 / V
公开/授权文献
- EP2846143B1 PRESSURE SENSOR 公开/授权日:2021-07-28
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