公开(公告)号：EP3882597A1

公开(公告)日：2021-09-22

申请号：EP19885163.6

申请日：2019-11-06

申请人： YAMASHIN FILTER CORP.

发明人： KITAJIMA, Nobuyuki ,  SASAKI, Nobuki ,  NOMOTO Megumi

IPC分类号： G01L13/06 ,  B01D24/00 ,  B01D29/00 ,  G01M3/00 ,  G01N7/00 ,  G01N15/08 ,  H01H35/26 ,  H01H35/38 ,  H01H36/00

摘要： A differential pressure measurement range is widened and differential pressure can be measured particularly during low differential pressure. A first spool facing a space in a high pressure side is lighter than a second spool facing a space in a low pressure side in a state where a magnet is provided. Urging force of a first elastic member that urges the first spool toward the space in the high pressure side is smaller than urging force of a second elastic member that urges the second spool toward the space in the high pressure side, and the first elastic member and the second elastic member are disposed in series.

公开(公告)号：EP3534132A1

公开(公告)日：2019-09-04

申请号：EP18159639.6

申请日：2018-03-02

申请人： Grundfos Holding A/S

发明人： Søren Kjeldsen,

IPC分类号： G01L19/00 ,  G01L13/06 ,  G01L15/00 ,  G01L19/06 ,  G01L19/14

摘要： Die Erfindung betrifft einen Drucksensor mit zumindest einem Messelement (64) und zumindest einem in einem Sensorkörper (34) angeordneten Fluidkanal (70), welcher eine Druckaufnahmeöffnung (74) mit dem Messelement (64) verbindet, wobei der Fluidkanal (70) zumindest eine Querschnitts- und/oder Richtungsänderung aufweist, und, dass zumindest ein Abschnitt des Fluidkanals (70), in welchem die zumindest eine Querschnitts- und/oder Richtungsänderung gelegen ist, in einer in einem generativen Fertigungsverfahren gefertigten Struktur (44) des Sensorkörpers (34) ausgebildet ist, sowie ein Pumpenaggregat mit einem solchen Drucksensor.

公开(公告)号：EP3534131A1

公开(公告)日：2019-09-04

申请号：EP18159638.8

申请日：2018-03-02

申请人： Grundfos Holding A/S

发明人： KJELDSEN, Sören

IPC分类号： G01L19/00 ,  G01L13/06 ,  G01L15/00 ,  G01L19/06 ,  G01L19/14

摘要： Die Erfindung betrifft einen Drucksensor mit einer Leiterplatte (48), einem an der Leiterplatte (48) angeordneten Messelement und zumindest einem ersten mit dem Messelement (64) verbundenen Fluidkanal (52), wobei der erste Fluidkanal (52) sich ausgehend von einer ersten Seite (56) der Leiterplatte (48) durch eine Ausnehmung (54) in der Leiterplatte (48) hindurch zu einer zweiten Seite (58) der Leiterplatte (48) erstreckt und an dieser zweiten Seite (58) der Leiterplatte (48) mit dem Messelement (64) verbunden ist sowie ein Pumpenaggregat mit einem solchen Drucksensor.

公开(公告)号：EP3199934A4

公开(公告)日：2018-06-06

申请号：EP15843609

申请日：2015-08-18

申请人： SEIKO INSTR INC

发明人： SHINOHARA YOKO ,  SUDA MASAYUKI ,  OUMI MANABU ,  UCHIYAMA TAKESHI ,  KAIHO YOSHIYUKI ,  NOBE AYAKO

IPC分类号： G01L7/00 ,  G01C5/06 ,  G01F1/34 ,  G01L13/02 ,  G01L13/06

CPC分类号： G01L13/02 ,  G01C5/06 ,  G01F1/34 ,  G01L7/00 ,  G01L13/06

摘要： The present invention provides a pressure change measuring apparatus and a pressure change measuring method, which are capable of detecting a change in pressure to be measured with respect to a time axis with high accuracy. Specifically, a reference value setting unit (60) included in a pressure change measuring apparatus (1) is configured to generate a reference value signal based on an output signal of a differential pressure measuring cantilever (4) under a predetermined state, and to output the reference value signal. An arithmetic processing unit (30) is configured to calculate the pressure change in pressure to be measured based on the output signal, the reference value signal, a volume of a cavity (10), a flowing quantity of a pressure transmission medium flowing into and out of the cavity (10) for every unit of a predetermined time period, and the like.

公开(公告)号：EP3163275A1

公开(公告)日：2017-05-03

申请号：EP14895825

申请日：2014-06-25

申请人： SEIKO INSTR INC

发明人： SHINOHARA YOKO ,  UCHIYAMA TAKESHI ,  OUMI MANABU ,  SUDA MASAYUKI

IPC分类号： G01L7/00 ,  G01L9/00 ,  G01L13/06

CPC分类号： G01L23/10 ,  G01L9/0002 ,  G01L9/0052

摘要： An arithmetic processing unit (30) included in a pressure change measuring apparatus (1) includes: a differential pressure calculation unit configured to obtain a pressure difference between an inner pressure of a cavity (10) and a pressure to be measured based on an output signal of a differential pressure measuring cantilever (4); a pressure-to-be-measured calculating unit configured to calculate the pressure to be measured based on a set inner pressure of the cavity (10) and the differential pressure calculated by the differential pressure calculation unit; a flow rate calculating unit configured to calculate a flowing quantity of a pressure transmission medium flowing into and out of the cavity (10) for every unit of a predetermined time period based on the differential pressure calculated by the differential pressure calculation unit; and an inner pressure updating unit configured to calculate the inner pressure of the cavity (10) after the predetermined time period based on the flowing quantity calculated by the flow rate calculating unit and a volume of the cavity (10), and to update, to the calculated inner pressure, a set value of the inner pressure of the cavity (10) to be used by the pressure-to-be-measured calculating unit.

摘要翻译： 包括在压力变化测量装置（1）中的算术处理单元（30）包括：压差计算单元，被配置为基于输出获得腔体（10）的内部压力与待测量压力之间的压力差 差压测量悬臂（4）信号; 待测压力计算单元，被配置为基于所述腔体的设定内压和由所述压差计算单元计算出的压差来计算待测压力; 流量计算单元，被配置为基于由压差计算单元计算的压差，计算在预定时间段的每个单元中流入和流出空腔（10）的压力传递介质的流量; 以及内部压力更新单元，其被配置为基于由所述流量计算单元计算的流量和所述腔体（10）的体积，计算在所述预定时间段之后的所述腔体（10）的内部压力，并且更新为 所计算的内部压力是待测压力计算单元要使用的空腔（10）的内部压力的设定值。

公开(公告)号：EP2846143A1

公开(公告)日：2015-03-11

申请号：EP13785081.4

申请日：2013-03-19

申请人： Seiko Instruments Inc. ,  The University of Tokyo

发明人： SHIMOYAMA Isao ,  MATSUMOTO Kiyoshi ,  TAKAHASHI Hidetoshi ,  NGUYEN Minh-Dung ,  SHINOHARA Yoko ,  UCHIYAMA Takeshi ,  OUMI Manabu ,  SHINOGI Masataka

IPC分类号： G01L9/00 ,  G01L13/06 ,  H01L29/84

CPC分类号： G01L1/16 ,  G01L1/10 ,  G01L9/0002 ,  G01L9/0045 ,  G01L9/008 ,  G01L13/06 ,  G01L23/04

摘要： A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f LOW (Hz) defined by Expression (1), where a width (µm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. f LOW = k ⋅ G 2 / V

摘要翻译： 压力传感器包括传感器主体，其具有第一表面和在第一表面中具有开口的空腔，悬臂，其具有支撑在第一表面上的基端部分，以及远端部分，设置成从周边边缘形成间隙 在开口内的开口内部，根据空腔的内外压力而弯曲变形，由半导体材料形成，位移测量单元，其根据压力测量悬臂振动的位移 由式（1）定义的频率大于下限频率f LOW（Hz）的频率的差，其中间隙的宽度（μm）由G表示，空腔的体积（ml）由V表示， 比例常数由k表示。 f LOW = k

公开(公告)号：EP1596177A1

公开(公告)日：2005-11-16

申请号：EP04710547.3

申请日：2004-02-12

申请人： FUJIKIN INCORPORATED

发明人： SEKOGUCHI, Kotohiko

IPC分类号： G01L13/06

CPC分类号： G01L13/06

摘要： The present invention provides an ultra-precision micro-differential pressure measuring device which is capable of continuously measuring a micro-differential pressure with high precision by transmitting the micro-differential pressure to an electronic weighing and pressure converting device without passing through any mechanical sliding part, and is simple in structure and can lower manufacturing costs substantially.
The ultra-precision micro-differential pressure measuring device comprises a device body 1 having an inner space part therein, a pressure receiving plate 3 which is installed inside the inner space of the device body 1 and divides the said inner space hermetically into a lower space 7 and an upper part space 8, an electronic weighing and pressure converting device 2 which is installed in the lower space 7, and supports and secures the pressure receiving plate 3, and a liquid sealing part R which liquid-seals the outer peripheral part of the afore-mentioned pressure receiving plate 3 and maintains the air-tightness between the lower space 7 and the upper space 8. A micro-differential pressure between a pressure P 1 inside the upper space 8 and a pressure P 2 inside the lower space 7 is measured by the electronic weighing and pressure converting device 2 through the pressure receiving plate 3.

摘要翻译： 本发明提供一种超精密微差压测量装置，其能够通过将微差压传递到电子称重和压力转换装置而不经过任何机械滑动部件而以高精度连续测量微差压 ，结构简单，可大幅度降低制造成本。 超精密微差压测量装置包括其中具有内部空间部分的装置主体1，压力接收板3，其安装在装置主体1的内部空间内部并且密封地分隔所述内部空间 进入下部空间7和上部空间8，安装在下部空间7中并支撑并固定受压板3的电子称量和压力转换装置2以及液体密封部 上述压力接收板3的外周部分，并保持下部空间7与上部空间8之间的气密性。上部空间8内的压力P1与下部空间8内的压力P2之间的微差压 空间7由电子称重和压力转换装置2通过压力接收板3测量。

公开(公告)号：EP1395802A4

公开(公告)日：2005-10-26

申请号：EP02734542

申请日：2002-05-24

申请人： PANAMETRICS

发明人： GOKHFELD YUZEF

IPC分类号： G01L13/06 ,  G01L9/00 ,  G01L9/12 ,  G01L13/02 ,  G01L19/02 ,  G01L19/04

CPC分类号： G01L9/0072 ,  G01L9/12 ,  G01L9/125 ,  G01L13/025 ,  G01L19/02

摘要： A high sensitivity pressure sensor with long term stability including a housing with first and second chambers, a membrane (20) separating the first and second chambers, a first electrode located in the first chamber (16) and spaced from one side of the membrane forming a first capacitor therewith, and a second electrode located in the second chamber (18) and spaced from an opposite side of the membrane forming a second capacitor therewith.

摘要翻译： 一种具有长期稳定性的高灵敏度压力传感器，包括具有第一和第二腔室的壳体，分隔第一和第二腔室的膜，位于第一腔室中的与第一电极的一侧间隔开并形成第一电容器的第一电极，以及 第二电极位于第二腔室中，与隔膜的相对侧间隔开，形成第二电容器。 测量电路跨越第一和第二电容器连接，用于通过检测第一和第二电容器之间的电容差异来测量膜位移，并且补偿电路被配置为通过减小电场间隔 第一电极和膜，同时增加第二电极和膜之间的电压差，反之亦然，以提供长期的稳定性。 本发明还具有用于压力传感器的独特补偿电路和制造和操作压力传感器的方法。

公开(公告)号：EP0774651A2

公开(公告)日：1997-05-21

申请号：EP96115912.6

申请日：1996-10-04

申请人： Landis & Gyr Technology Innovation AG

发明人： Mannhart, Jevgenij ,  Bichsel, Jürg

IPC分类号： G01L13/06

CPC分类号： G01L9/007 ,  G01L9/105

摘要： Ein Differenzdrucksensor weist zwei Membrane (5; 6) auf, die entlang einer vorbestimmten Achse (7) auslenkbar sind. Die Auslenkung wenigstens einer der Membranen (5; 6) ist proportional zur Druckdifferenz p 1 - p 2 . Zur Detektion der Auslenkung der Membranen (5; 6) sind zwei Spulen (8; 9) vorgesehen. Bei einer Änderung der Druckdifferenz p 1 - p 2 bewegen sich die beiden Membranen (5; 6) in entgegengesetzter Richtung. Eine Änderung der Lage des Druckdifferenzsensors bzw. der Temperatur kann dazu führen, dass sich die Membranen (5; 6) unter dem Einfluss der Gravitation bzw. der Temperatur leicht deformieren. Dabei ändert sich der Abstand x 1 bzw. x 2 zwischen den Membranen (5; 6) und den Spulen (8; 9) in gleicher Weise, so dass die Differenzdruckmessung nicht beeinflusst wird.

摘要翻译： 用于测量气体或液体中的流速的压力差传感器包括穿过中心轴线（7）彼此平行延伸的两个膜（5,6）。 第一膜（5）的移动由压差p1-p2引起并与之成比例，并从线圈（8）产生信号S1。 与第一隔膜（6）电连接的另一个线圈（9）检测第二隔膜（6）的移动，并给出两者之和（S1 + S2）的信号S. 随着压差p1-p2的变化，两个膜都沿相反方向移动。 传感器周围的位置或温度的变化可能容易使一个膜变形; 但是当使用两个膜和线圈时，膜和线圈之间的距离相等地变化，使得压力差测量不受影响。

公开(公告)号：EP0177491B2

公开(公告)日：1994-04-27

申请号：EP84901555.7

申请日：1984-03-30

申请人： ROSEMOUNT INC.

发明人： CUCCI, Gerald, R.

IPC分类号： G01L13/06

CPC分类号： G01L9/125

摘要： A differential pressure sensor (10) senses a difference in pressure between a first input (low) pressure (12) or "reference pressure" and a second input (high) pressure (14) and provides a differential sensor signal representative of the difference in pressure. The reference pressure is sensed by a reference pressure sensor (26) which provides a reference signal representative of the reference pressure. The differential sensor signal and the reference signal are provided to a correction circuit. The correction circuit (24), which is preferably a digital computer, adjusts the reference signal and provides an improved output signal as a function of the differential sensor signal and the adjusted reference signal.