发明公开
- 专利标题： SUCTION DEVICE
- 专利标题（中）： 抽吸装备
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申请号： EP16726264申请日： 2016-02-29
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公开(公告)号： EP3081349A4公开(公告)日： 2016-12-28
- 发明人: IWASAKA HITOSHI , TOKUNAGA HIDEYUKI , KASAI YUJI
- 申请人： HARMOTEC CO LTD
- 专利权人： HARMOTEC CO LTD
- 当前专利权人： HARMOTEC CO LTD
- 优先权： JP2015041426 2015-03-03
- 主分类号： B25J15/06
- IPC分类号： B25J15/06 ; B65G49/07 ; H01L21/67 ; H01L21/677 ; H01L21/683
摘要：
Suction equipment 10 is provided with a swirl flow-forming body 1, a baffle plate 2, and connecting members 3 that connect swirl flow-forming body 1 and baffle plate 2. Baffle plate 2 obstructs a member W to which suction is applied from entering a concave part 12 provided in swirl flow-forming body 1. Connecting members 3 form, between end face 13 and baffle plate 2, a flow path for fluid to flow out of concave part 12.
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