发明公开
- 专利标题: PACKAGED SENSOR ASSEMBLY
- 专利标题(中): GEHÄUSTESENSORANORDNUNG
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申请号: EP15200289.5申请日: 2015-12-15
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公开(公告)号: EP3098195A1公开(公告)日: 2016-11-30
- 发明人: BRUNO, Giuseppe , CONTI, Sebastiano , CHIRICOSTA, Mario , VAIANA, Michele , IPPOLITO, Calogero Marco , MAIORE, Mario , CASELLA, Daniele
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: Via C. Olivetti, 2 20864 Agrate Brianza (MB) IT
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: Via C. Olivetti, 2 20864 Agrate Brianza (MB) IT
- 代理机构: Bernotti, Andrea
- 优先权: ITUB20151173 20150529
- 主分类号: B81B7/00
- IPC分类号: B81B7/00 ; G01L19/00
摘要:
A packaged sensor assembly includes: a packaging structure (2), having at least one opening (18); a humidity sensor (5) and a pressure sensor (10), which are housed inside the packaging structure (2) and communicate fluidically with the outside through the opening (18), and a control circuit (7), operatively coupled to the humidity sensor (5) and to the pressure sensor (10);
wherein the humidity sensor (5) and the control circuit (7) are integrated in a first chip (3), and the pressure sensor (10) is integrated in a second chip (8) distinct from the first chip (3) and bonded to the first chip (3).
wherein the humidity sensor (5) and the control circuit (7) are integrated in a first chip (3), and the pressure sensor (10) is integrated in a second chip (8) distinct from the first chip (3) and bonded to the first chip (3).
公开/授权文献
- EP3098195B1 PACKAGED SENSOR ASSEMBLY 公开/授权日:2021-01-27
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