- 专利标题: TRANSISTOR GATE METAL WITH LATERALLY GRADUATED WORK FUNCTION
-
申请号: EP14900215申请日: 2014-08-19
-
公开(公告)号: EP3183752A4公开(公告)日: 2018-03-21
- 发明人: JAN CHIA HONG , HAFEZ WALID , CHANG HSU YU , OLAC VAW ROMAN , CHANG TING , RAMASWAMY RAHUL , LIU PEI CHI , DIAS NEVILLE
- 申请人: INTEL CORP
- 专利权人: INTEL CORP
- 当前专利权人: INTEL CORP
- 优先权: US2014051619 2014-08-19
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/28 ; H01L21/3115 ; H01L21/3213 ; H01L21/336 ; H01L21/8234 ; H01L29/49
摘要:
Semiconductor device(s) including a transistor with a gate electrode having a work function monotonically graduating across the gate electrode length, and method(s) to fabricate such a device. In embodiments, a gate metal work function is graduated between source and drain edges of the gate electrode for improved high voltage performance. In embodiments, thickness of a gate metal graduates from a non-zero value at the source edge to a greater thickness at the drain edge. In further embodiments, a high voltage transistor with graduated gate metal thickness is integrated with another transistor employing a gate electrode metal of nominal thickness. In embodiments, a method of fabricating a semiconductor device includes graduating a gate metal thickness between a source end and drain end by non-uniformly recessing the first gate metal within the first opening relative to the surrounding dielectric.
信息查询
IPC分类: