- 专利标题: SEMICONDUCTOR INTEGRATED DEVICE WITH ELECTRICAL CONTACTS BETWEEN STACKED DIES AND CORRESPONDING MANUFACTURING PROCESS
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申请号: EP17172106.1申请日: 2017-05-20
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公开(公告)号: EP3326964A1公开(公告)日: 2018-05-30
- 发明人: DUQI, Enri , BALDO, Lorenzo , GIUSTI, Domenico
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: Via C. Olivetti 2 Agrate Brianza IT
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: Via C. Olivetti 2 Agrate Brianza IT
- 代理机构: Nannucci, Lorenzo
- 优先权: IT201600121003 20161129
- 主分类号: B81C1/00
- IPC分类号: B81C1/00
摘要:
Described herein is an integrated device (1), having: a first die (2); a second die (6) coupled in a stacked way on the first die (2) along a vertical axis (z); a coupling region (16) arranged between facing surfaces (2a, 6a) of the first die (2) and of the second die (6), which face one another along the vertical axis (z) and lie in a horizontal plane (xy) orthogonal to the vertical axis (z), for mechanical coupling of the first and second dies; electrical-contact elements (17) carried by the facing surfaces (2a, 6a) of the first and second dies, aligned in pairs along the vertical axis (z); and conductive regions (18) arranged between the pairs of electrical-contact elements (17) carried by the facing surfaces (2a, 6a) of the first and second dies, for their electrical coupling. Supporting elements (20) are arranged at the facing surface (2a; 6a) of at least one between the first and second dies and elastically support respective electrical-contact elements.
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