发明公开
- 专利标题: INFRARED DEVICE
-
申请号: EP17193760.0申请日: 2017-09-28
-
公开(公告)号: EP3462149A1公开(公告)日: 2019-04-03
- 发明人: Zäch, Nicolas , Winger, Martin
- 申请人: Sensirion AG
- 申请人地址: Laubisrütistrasse 50 8712 Stäfa CH
- 专利权人: Sensirion AG
- 当前专利权人: Sensirion AG
- 当前专利权人地址: Laubisrütistrasse 50 8712 Stäfa CH
- 代理机构: Toleti, Martin
- 主分类号: G01J5/08
- IPC分类号: G01J5/08 ; G01J3/10 ; G01J5/02 ; G01J5/12 ; G01J5/20 ; H01L27/144
摘要:
An infrared device comprises a substrate (1). A configuration (3) for one of absorbing and emitting infrared radiation is supported by the substrate (1). The configuration (3) comprises an electrically conducting layer arrangement (31) of less than 50 nm thickness between dielectric layers (34,35). In addition, one or more of a thermal sensor (5) arranged for sensing the infrared radiation absorbed by the configuration (3), and a heater (7) arranged for heating the configuration (3) to emit the infrared radiation is supported by the substrate (1)
公开/授权文献
- EP3462149B1 INFRARED DEVICE 公开/授权日:2023-10-25
信息查询