- 专利标题: EELS DETECTION TECHNIQUE IN AN ELECTRON MICROSCOPE
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申请号: EP18170373.7申请日: 2018-05-02
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公开(公告)号: EP3564982A1公开(公告)日: 2019-11-06
- 发明人: Freitag, Bert Henning , Lazar, Sorin , Kujawa, Stephan , Kuijper, Maarten , van Veen, Gerard Nicolaas , Tiemijer, Peter Christiaan , MacCormack, Jamie
- 申请人: FEI Company
- 申请人地址: 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构: Janssen, Francis-Paul
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/244 ; H01J37/26
摘要:
A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising:
- Providing a specimen on a specimen holder;
- Producing a beam of electrons from a source;
- Using an illuminator to direct said beam so as to irradiate the specimen;
- Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising:
▪ A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum;
▪ A detector, comprising a detection surface that is sub-divided into a plurality of detection zones,
specifically comprising:
- Using a first of said detection zones to register a first EELS spectral entity;
- Using a second of said detection zones to register a second EELS spectral entity;
- Reading out said first detection zone whilst said second detection zone is still registering said second spectral entity.
- Providing a specimen on a specimen holder;
- Producing a beam of electrons from a source;
- Using an illuminator to direct said beam so as to irradiate the specimen;
- Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising:
▪ A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum;
▪ A detector, comprising a detection surface that is sub-divided into a plurality of detection zones,
specifically comprising:
- Using a first of said detection zones to register a first EELS spectral entity;
- Using a second of said detection zones to register a second EELS spectral entity;
- Reading out said first detection zone whilst said second detection zone is still registering said second spectral entity.
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