公开(公告)号：EP3564982A1

公开(公告)日：2019-11-06

申请号：EP18170373.7

申请日：2018-05-02

申请人： FEI Company

发明人： Freitag, Bert Henning ,  Lazar, Sorin ,  Kujawa, Stephan ,  Kuijper, Maarten ,  van Veen, Gerard Nicolaas ,  Tiemijer, Peter Christiaan ,  MacCormack, Jamie

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/26

摘要： A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising:
- Providing a specimen on a specimen holder;
- Producing a beam of electrons from a source;
- Using an illuminator to direct said beam so as to irradiate the specimen;
- Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising:
▪ A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum;
▪ A detector, comprising a detection surface that is sub-divided into a plurality of detection zones,

specifically comprising:
- Using a first of said detection zones to register a first EELS spectral entity;
- Using a second of said detection zones to register a second EELS spectral entity;
- Reading out said first detection zone whilst said second detection zone is still registering said second spectral entity.