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    EELS DETECTION TECHNIQUE IN AN ELECTRON MICROSCOPE
    3.
    发明公开
    EELS DETECTION TECHNIQUE IN AN ELECTRON MICROSCOPE 审中-公开

    公开(公告)号：EP3564982A1

    公开(公告)日：2019-11-06

    申请号：EP18170373.7

    申请日：2018-05-02

    申请人： FEI Company

    发明人： Freitag, Bert Henning ,  Lazar, Sorin ,  Kujawa, Stephan ,  Kuijper, Maarten ,  van Veen, Gerard Nicolaas ,  Tiemijer, Peter Christiaan ,  MacCormack, Jamie

    IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/26

    摘要： A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising:
    - Providing a specimen on a specimen holder;
    - Producing a beam of electrons from a source;
    - Using an illuminator to direct said beam so as to irradiate the specimen;
    - Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising:
    ▪ A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum;
    ▪ A detector, comprising a detection surface that is sub-divided into a plurality of detection zones,

    specifically comprising:
    - Using a first of said detection zones to register a first EELS spectral entity;
    - Using a second of said detection zones to register a second EELS spectral entity;
    - Reading out said first detection zone whilst said second detection zone is still registering said second spectral entity.

    Method for determining a reconstructed image using a particle-optical apparatus
    4.
    发明公开
    Method for determining a reconstructed image using a particle-optical apparatus 有权
    一种用于使用粒子光学设备来确定重建图像的方法

    公开(公告)号：EP2518687A1

    公开(公告)日：2012-10-31

    申请号：EP11163633.8

    申请日：2011-04-26

    申请人： FEI Company

    发明人： Kuijper, Maarten

    IPC分类号： G06T5/00 ,  G06T5/50 ,  H01J37/22 ,  H01J37/26

    CPC分类号： H01J37/222 ,  G06T5/003 ,  G06T5/50 ,  G06T2207/10061 ,  H01J37/26

    摘要： A method for determining a reconstructed image using a particle-optical apparatus is described. The method comprises receiving (60) the plurality of pixel signals, determining (70) a reconstructed image from using Viterbi Detection on the plurality of pixel signals, the Viterbi Detection using a plurality of different states corresponding to a plurality of configurations of particles incident on the detector, and at least two states of the plurality of different states corresponding to a same, non-zero multiplicity of incident particles on a single pixel of the plurality of pixel signals.

    摘要翻译： 描述使用粒子光学设备用于确定性采矿的方法的重建图像。 该方法包括接收（60）的像素信号，确定的开采（70）从上的像素信号的多元性使用维特比检测的重构图像的多元性，维特比检测使用不同的状态对应于粒子入射的结构上的多个的多元性 检测器，并且不同的状态对应于同一的，非零重数入射粒子对像素信号的多个单个像素的多个至少两个状态。

    METHOD OF PREPARING A CRYOGENIC SAMPLE WITH IMPROVED COOLING CHARACTERISTICS
    5.
    发明公开
    METHOD OF PREPARING A CRYOGENIC SAMPLE WITH IMPROVED COOLING CHARACTERISTICS 审中-公开

    公开(公告)号：EP4368963A1

    公开(公告)日：2024-05-15

    申请号：EP22206241.6

    申请日：2022-11-08

    申请人： FEI COMPANY

    发明人： Kuijper, Maarten ,  Hazenberg, John ,  Hapers, Bas

    IPC分类号： G01N1/42 ,  H01J37/20

    CPC分类号： G01N1/42

    摘要： The invention relates to a method and an apparatus for preparing a cryogenic sample, whereby the sample is subjected to rapid cooling using a cryogen. The method comprises the step of providing a sample, said sample comprising a specimen provided on a substantially planar specimen carrier. The method comprises the step of providing at least one flow device for transporting cryogenic fluid to said sample, wherein said flow device comprises a first nozzle for directing a flow of cryogenic fluid onto said sample. Then, the sample is positioned next to said first nozzle and a flow of cryogenic fluid is provided out of said first nozzle in such a way that the sample is cryogenically cooled. As defined herein, the nozzle opening of the first nozzle has a width, as measured in a first direction, and a height, as measured in a second direction substantially perpendicular to said first direction, wherein said width is larger than said height. Using a non-circular, such as essentially oval or rectangular nozzle opening provides for more improved cooling, so that all parts of the specimen carrier are evenly cooled.

    METHOD OF PREPARING A CRYOGENIC SAMPLE WITH IMPROVED COOLING CHARACTERISTICS
    6.
    发明公开
    METHOD OF PREPARING A CRYOGENIC SAMPLE WITH IMPROVED COOLING CHARACTERISTICS 审中-公开

    公开(公告)号：EP4067860A1

    公开(公告)日：2022-10-05

    申请号：EP21166358.8

    申请日：2021-03-31

    申请人： FEI Company

    发明人： Kuijper, Maarten ,  Remigy, Hervé ,  Van den Bogaard, Ron ,  Koh, Adrian ,  Spee, Ivanka ,  Hazenberg, John ,  Van der Does, Marius

    IPC分类号： G01N1/42 ,  G01N1/28

    摘要： The invention relates to a method and an apparatus for preparing a cryogenic sample, whereby the sample is subjected to rapid cooling using a cryogen. A pair of conduits for transporting cryogenic fluid are provided, each of which conduits opens out into a mouthpiece, which mouthpieces are arranged to face each other across an intervening gap, wherein in said gap a sample that is provided on a substantially planar sample carrier can be received. Cryogenic fluid can be pumped through said conduits so as to concurrently flush from said mouthpieces and suddenly immerse the sample in cryogenic fluid from two opposite sides. As defined herein, at least one of said mouthpieces comprises at least two nozzle openings for evenly cooling said substantially planar sample carrier during said flushing.

    ILLUMINATION APERTURES FOR EXTENDED SAMPLE LIFETIMES IN HELICAL TOMOGRAPHY
    7.
    发明公开
    ILLUMINATION APERTURES FOR EXTENDED SAMPLE LIFETIMES IN HELICAL TOMOGRAPHY 审中-公开

    公开(公告)号：EP4024040A1

    公开(公告)日：2022-07-06

    申请号：EP21214237.6

    申请日：2021-12-14

    申请人： FEI Company

    发明人： Shánel, Ondrej ,  Schneider, Martin ,  Varslot, Trond ,  Kuijper, Maarten ,  Baco, Ondrej ,  Batelka, Václav

    IPC分类号： G01N23/2251 ,  G21K1/04

    摘要： Apertures (108) having references edges are situated to define a sample irradiation zone (131) and a shielded zone. The sample irradiation zone (131) includes a portion proximate the shielded zone that is conjugate to a detector (116). A sample (112) is scanned into the sample irradiation zone (131) from the shielded zone so that the sample (112) can remain unexposed until situated properly with respect to the detector (116) for imaging. Irradiation exposure of the sample (112) is reduced, permitting superior imaging and less damage to the sample (112). The sample can be translated longitudinally and rotated and an electron beam (104) can be used in order to form images by electron beam tomography.

    DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MICROSCOPE
    9.
    发明公开
    DIFFRACTION PATTERN DETECTION IN A TRANSMISSION CHARGED PARTICLE MICROSCOPE 审中-公开

    公开(公告)号：EP3444836A1

    公开(公告)日：2019-02-20

    申请号：EP17186546.2

    申请日：2017-08-17

    申请人： FEI Company

    发明人： Buijsse, Bart ,  Kuijper, Maarten

    IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/22

    摘要： A method of using a Transmission Charged Particle Microscope, comprising:
    - Providing a specimen on a specimen holder;
    - Using a charged particle beam column to produce a charged particle beam and irradiate at least a portion of the specimen therewith;
    - Using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector;
    - Using said detector to record a diffraction pattern of said irradiated portion of the specimen,
    further comprising:
    - Configuring said detector to operate in particle counting mode;
    - Recording said diffraction pattern iteratively in a series of successive detection frames, and summing said frames;
    - During recording of each frame, causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a known, controllable locus on said detector.