发明公开
- 专利标题： PIEZOELECTRIC ACTUATOR HAVING A DEFORMATION SENSOR AND FABRICATION METHOD THEREOF
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申请号： EP21171642.8申请日： 2021-04-30
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公开(公告)号： EP3907178A1公开(公告)日： 2021-11-10
- 发明人: GIUSTI, Domenico , PRELINI, Carlo Luigi , FERRERA, Marco , LAZZARI, Carla Maria , SEGHIZZI, Luca , BONI, Nicolò , CARMINATI, Roberto , QUAGLIA, Fabio
- 申请人： STMicroelectronics S.r.l.
- 申请人地址： IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构： Cerbaro, Elena
- 优先权： US202017137220 20201229
- 主分类号： B81B7/00
- IPC分类号： B81B7/00
摘要：
The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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