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公开(公告)号：EP4310573A1
公开(公告)日：2024-01-24
申请号：EP23183016.7
申请日：2023-07-03
发明人： MERLI, Massimiliano , CARMINATI, Roberto , BONI, Nicolò , COSTANTINI, Sonia , PRELINI, Carlo Luigi
IPC分类号： G02B26/08
摘要： Micro-electro-mechanical mirror device (1) having a fixed structure (2) defining an external frame (2') which delimits a cavity (3); a tiltable structure (4) extending into the cavity; a reflecting surface (4') carried by the tiltable structure and having a main extension in a horizontal plane (XY); an actuation structure (10), coupled between the tiltable structure (4) and the fixed structure (2). The actuation structure (10) is formed by at least one first pair of actuation arms (12A, 12B) configured to cause the rotation of the tiltable structure (2) around a first rotation axis (SA) parallel to the horizontal plane (XY). The actuation arms of the first pair of actuation arms (12A, 12B) are elastically coupled to the tiltable structure (4) through respective coupling elastic elements (14A, 14B) and are each formed by a bearing structure (15) and by a piezoelectric structure (13). The bearing structure (15) of each actuation arm of the first pair of actuation arms (12A, 12B) is formed by a soft region (56) of a first material and the coupling elastic elements (14A, 14B) are formed by a bearing layer (103) of a second material, the second material having greater stiffness than the first material.
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2.发明公开
公开(公告)号：EP3974890A1
公开(公告)日：2022-03-30
申请号：EP21199380.3
申请日：2021-09-28
摘要： A microelectromechanical device (10) has: a fixed structure (14) having a frame (14') defining a cavity (13); a tiltable structure (12) elastically suspended above the cavity with main extension in a horizontal plane (xy); a piezoelectrically driven actuation structure (22), which can be biased to cause a desired rotation of the tiltable structure about a first rotation axis (Al) and a second rotation axis (A2); and a supporting structure (15) integral with the fixed structure and extending in the cavity starting from the frame. Lever elements (16) are elastically coupled to the tiltable structure at a first end by respective elastic suspension elements (18) and to the supporting structure at a second end by elastic connecting elements (20), of a torsional type, which define a lever rotation axis (L); the lever elements are elastically coupled to the actuation structure so that their biasing causes, as a result of their rotation about the lever rotation axis, the desired rotation of the tiltable structure about the first and second rotation axes.
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3.发明公开
公开(公告)号：EP3715317A1
公开(公告)日：2020-09-30
申请号：EP20166471.1
申请日：2020-03-27
摘要： A MEMS device (20) formed in a die of semiconductor material (24) defining a cavity (23) and having an anchorage portion (24'); a tiltable structure (22) elastically suspended over the cavity (23) and having a main extension in a horizontal plane (XY); a first and a second supporting arm (25A, 25B), extending between the anchorage portion and opposite sides of the tiltable structure; and a first and a second resonant piezoelectric actuation structure (30A1, 30A2), intended to be biased and cause rotation of the tiltable structure (22) about a rotation axis (A). The first supporting arm is formed by a first and a second torsion spring (27A, 28A), which are rigid to movements out of the horizontal plane (XY) and compliant to torsion about the rotation axis and are coupled together at a constraint region (29A). The first and the second resonant piezoelectric actuation structures (38A1, 38A2) extend between the anchorage portion and the constraint region (29A), on a first and a second side, respectively, of the first supporting arm (25A).
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4.发明公开
公开(公告)号：EP3712676A1
公开(公告)日：2020-09-23
申请号：EP20159965.1
申请日：2020-02-28
摘要： A microelectromechanical structure (10) has: a body of semiconductor material having a fixed frame (11) internally defining a cavity (12); a mobile mass (14) elastically suspended in the cavity and movable with a first resonant movement of rotation about a first rotation axis (R1) and with a second resonant movement of rotation about a second rotation axis (R2), orthogonal to the first rotation axis (R1); a first (16a, 16b) and a second pair (16c, 16d) of supporting elements, which extend in a cantilever fashion in the cavity, are rigidly coupled to the frame, and can be deformed by piezoelectric effect to cause rotation of the mobile mass about the first rotation axis and the second rotation axis; and a first (30a, 30b) and a second (30c, 30d) pair of elastic-coupling elements, elastically coupled between the mobile mass and the first and the second pairs of supporting elements; the first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and the second pairs.
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5.发明公开
公开(公告)号：EP4187289A1
公开(公告)日：2023-05-31
申请号：EP22207166.4
申请日：2022-11-14
摘要： A MEMS shutter including: a substrate (2) of semiconductor material traversed by a main aperture (9), and a first semiconductor layer (14) and a second semiconductor layer (16), which form a supporting structure (28, 71) fixed to the substrate; a plurality of deformable structures (29, 59, 69); a plurality of actuators (36; 96); and a plurality of shielding structures (33; 35; 333; 335; 433), each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter (1), pairs of adjacent shielding structures at least partially overlap one another.
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6.发明公开
公开(公告)号：EP4187288A1
公开(公告)日：2023-05-31
申请号：EP22207130.0
申请日：2022-11-14
摘要： A MEMS shutter (1) including: a semiconductor substrate (2) traversed by an aperture (9); a first semiconductor layer (14) and a second semiconductor layer (16), which form a supporting structure (28, 71, 87; 28, 171) fixed to the substrate; a plurality of deformable structures (29, 59, 68, 85; 169), each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers; a plurality of actuators (36; 96); a plurality of shielding structures (33; 35; 333; 335; 433), each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers, the shielding structures being arranged angularly around the underlying aperture so as to provide shielding of the aperture, each shielding structure being further coupled to the supporting structure via a deformable structure. Each actuator may be controlled so as to translate a corresponding shielding structure between a first position and a second position, thus varying shielding of the aperture; the first and second positions of the shielding structures are such that, in at least one operating condition, pairs of adjacent shielding structures at least partially overlap one another.
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公开(公告)号：EP4075184A1
公开(公告)日：2022-10-19
申请号：EP22167952.5
申请日：2022-04-12
IPC分类号： G02B26/08
摘要： MEMS device (20) comprising: a semiconductor body (21) with a cavity (23) and forming an anchor portion (24'); a tiltable structure (22) elastically suspended on the cavity (23); a first and a second support arm (25A, 25B) to support the tiltable structure (22); a first and a second piezoelectric actuation structure (30A1, 30A2) biasable to deform mechanically, generating a rotation of the tiltable structure (22) around a rotation axis (A). The piezoelectric actuation structures (30A1, 30A2) carry a first (41A1) and, respectively, a second piezoelectric displacement sensor (41A2) of the MEMS device (20). When the tiltable structure (22) rotates around the rotation axis (A), the displacement sensors (41A1, 41A2) are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure (22). The sensing signals are configured to be acquired in a differential manner.
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8.发明公开
公开(公告)号：EP3936907A1
公开(公告)日：2022-01-12
申请号：EP21184894.0
申请日：2021-07-09
摘要： The MEMS micromirror device (20) is formed in a package (24) including a containment body (22) and a lid (26) transparent to a light radiation. The package forms a cavity (23) housing a tiltable platform (21) having a reflecting surface (21A). A metastructure (30-32) is formed on the lid (26) and/or on the reflecting surface (21A) and comprises a plurality of diffractive optical elements (35).
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公开(公告)号：EP3907178A1
公开(公告)日：2021-11-10
申请号：EP21171642.8
申请日：2021-04-30
发明人： GIUSTI, Domenico , PRELINI, Carlo Luigi , FERRERA, Marco , LAZZARI, Carla Maria , SEGHIZZI, Luca , BONI, Nicolò , CARMINATI, Roberto , QUAGLIA, Fabio
IPC分类号： B81B7/00
摘要： The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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公开(公告)号：EP3839605A1
公开(公告)日：2021-06-23
申请号：EP20215797.0
申请日：2020-12-18
摘要： The micro-electro-mechanical device is formed by a fixed structure (64) having a cavity (63); a tiltable structure (62) elastically suspended over the cavity (63), having a main extension in a tiltable plane (AB), and rotatable about a rotation axis (B) parallel to the tiltable plane (AB); and a piezoelectric actuation structure (70) including at least a first and a second driving arm (72A, 72B), the first and the second driving arms carrying respective piezoelectric material regions (73) and extending on opposite sides of the rotation axis (B). The first and the second driving arms (72A, 72B) are rigidly coupled to the fixed structure (64) and are elastically coupled to the tiltable structure (62). A stop structure (83A-83D) limits movements of the tiltable structure (62) with respect to the actuation structure (70) along a planar direction (A) perpendicular to the rotation axis (B). The stop structure has a first planar stop element (83A) formed between the first driving arm (72A) and the tiltable structure (62) and a second planar stop element (83B) formed between the second driving arm (72B) and the tiltable structure.
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