- 专利标题: SYSTEM FOR MONITORING DEFECTS WITHIN AN INTEGRATED SYSTEM PACKAGE
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申请号: EP23202590.8申请日: 2023-10-10
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公开(公告)号: EP4361625A1公开(公告)日: 2024-05-01
- 发明人: GIUSTI, Domenico , DEL SARTO, Marco , QUAGLIA, Fabio , DUQI, Enri
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构: Studio Torta S.p.A.
- 优先权: IT 202200021900 2022.10.24
- 主分类号: G01N29/04
- IPC分类号: G01N29/04 ; G01N29/07 ; G01N29/11
摘要:
An integrated electronic system (1) is provided with a package (2) formed by a support base (4) and a coating region (5) arranged on the support base (4) and having at least a first system die (6), including semiconductor material, coupled to the support base (4) and arranged in the coating region (5). The integrated electronic system also has, within the package (2), a monitoring system (14) configured to determine the onset of defects within the coating region (5), through the emission of acoustic detection waves and the acquisition of corresponding received acoustic waves, whose characteristics are affected by, and therefore are indicative of, the aforementioned defects.
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