Invention Patent
JP2005023063A New lactone compound 审中-公开
新Lactone化合物

New lactone compound
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure which gives a polymer having more excellent properties as a resist material or the like, and an alcohol having a lactone structure useful as a raw material therefor or the like.
SOLUTION: The compound is represented by general formula [1] (wherein either one of R
1 and R
2 is a hydrogen atom, an acryloyl group or a methacryloyl group and the other is an alkyl group; R
3 and R
4 are each independently a hydrogen atom or an alkyl group; R
5 and R
6 are each a hydrogen atom or form a methylene chain optionally substituted with an alkyl group; and R
7 and R
8 are each independently a hydrogen atom or a methyl group).
COPYRIGHT: (C)2005,JPO&NCIPI
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