Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing a 2-alkyl-2-adamantyl (meth)acrylate having excellent physical properties such as excellent dry etching resistance in a semiconductor production process and useful as a semiconductor resist material in high pyrity and yield. SOLUTION: The 2-alkyl-2-adamantyl (meth)acrylate expressed by general formula (2) (R 1 is a 1-3C alkyl; and R 2 is acryloyl group or methacryloyl group) is produced by reacting a 2-alkyl-2-adamantanol expressed by general formula (1) with an alkyl magnesium halide or a phenyl magnesium halide and then reacting with a (meth)acryloylation agent. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide such an electrophotographic photoreceptor that a charge transport material to be used therein has high mobility and the resulting film as photosensitive layer having the charge transport material is stable, thus attaining high sensitivity and low residual voltage and withstanding practical use. SOLUTION: The electrophotographic photoreceptor is such that the photosensitive layer essentially having a charge generator and a charge transfer agent is formed on an electrically conductive substrate. In this electrophotographic photoreceptor, the charge transport material in the photosensitive layer is a compound represented by the general formula (1). COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure which gives a polymer having more excellent properties as a resist material or the like, and an alcohol having a lactone structure useful as a raw material therefor or the like. SOLUTION: The compound is represented by general formula [1] (wherein either one of R 1 and R 2 is a hydrogen atom, an acryloyl group or a methacryloyl group and the other is an alkyl group; R 3 and R 4 are each independently a hydrogen atom or an alkyl group; R 5 and R 6 are each a hydrogen atom or form a methylene chain optionally substituted with an alkyl group; and R 7 and R 8 are each independently a hydrogen atom or a methyl group). COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation:要解决的问题:提供具有内酯结构的新型单体化合物,其赋予作为抗蚀剂材料等具有更优异性能的聚合物,以及具有可用作其原料的内酯结构等的醇 。 解决方案:该化合物由通式[1]表示(其中R 1和R 2中的任一个是氢原子,丙烯酰基或甲基丙烯酰基 基团,另一个是烷基; R 3和R 4彼此独立地是氢原子或烷基; R 5和R 4都是 各自为氢原子或形成任选被烷基取代的亚甲基链; R“SP”7和R“SP”8各自独立地为氢 原子或甲基)。 版权所有(C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure and capable of providing a polymer having excellent characteristics as a resist material or the like. SOLUTION: The compound is represented by general formula [1] (wherein R 1 and R 2 are each independently an alkyl group; R 3 and R 4 are each independently a hydrogen atom or an alkyl group; R 5 is a hydrogen atom, an acryloyl group or a methacryloyl group; X is a methylene group which may be substituted with an alkyl group or an ethylene group which may be substituted with the alkyl group). The present invention provides a compound having a lactone structure and providing a polymer having excellent characteristics, especially as a resist material and an alcohol substance having a lactone structure useful as the raw material or the like. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation:要解决的问题:提供具有内酯结构并能够提供具有优异特性的聚合物作为抗蚀剂材料等的新单体化合物。 解决方案:该化合物由通式[1](其中R 1和R 2各自独立地是烷基)表示; R 3 = SP>和R“SP 4”各自独立地为氢原子或烷基; R 5为氢原子,丙烯酰基或甲基丙烯酰基; X为亚甲基 其可以被可被烷基取代的烷基或亚乙基取代)。 本发明提供具有内酯结构并提供具有优异特性的聚合物的化合物,特别是作为抗蚀剂材料和具有用作原料等的内酯结构的醇物质。 版权所有(C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a safe method for producing a (meth)acrylic ester of a cyclic secondary or tertiary alcohol in good handling nature and workability as well as in a high yield. SOLUTION: The (meth)acrylic ester of a cyclic secondary or tertiary alcohol is produced by reacting a mixed acid anhydride represented by the formula: CH 2 =C(R 1 )-CO-OA [wherein, R 1 is H or CH 3 ; A is represented by the formula: -CO-R 2 (wherein, R 2 is a t-butyl group, 2,3-dimethyl-2-butyl group, 2-methyl-2-pentyl group, 3-methl-3-pentyl group, 4-nitrophenyl group or 2,4,6-trichlorophenyl group)] and a cyclic secondary or tertiary alcohol-based compound selected from a metal alkoxide of a cycloaliphatic alcohol, a hydroxylactone and an alcohol containing a condensed cycloaliphatic lactone in which an alcoholic hydroxyl is linked to a carbon atom constituting an aliphatic ring. COPYRIGHT: (C)2004,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure and giving a polymer having improved properties as a resist material, etc. SOLUTION: The compound is expressed by general formula (1) (one of R 1 and R 2 is methyl and the other is isopropyl; one of R 3 and R 4 is H and the other is hydroxy, acryloyloxy or methacryloyloxy; R 5 and R 6 are each independently H or an alkyl; X is (R 7 )(R 8 )C-C(R 9 )(R 10 ); and R 7 , R 8 , R 9 and R 10 are each independently H or an alkyl). COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation:要解决的问题:提供具有内酯结构的新型单体化合物,并提供具有改进性能的聚合物作为抗蚀剂材料等。溶液:该化合物由通式(1)表示(1 R 1 SP>和R 2 SP>是甲基,另一个是异丙基; R 3和R 4中的一个是H 另一个是羟基,丙烯酰氧基或甲基丙烯酰氧基; R 5和R 6共同独立地是H或烷基; X是(R SP 7) (R 8 SP>)CC(R 9 SP>)(R 10 SP>); R R 4,R 10和R 10各自独立地为H或烷基。 版权所有(C)2005,JPO&NCIPI