公开(公告)号：JP2005023063A

公开(公告)日：2005-01-27

申请号：JP2004150218

申请日：2004-05-20

Applicant: Takasago Internatl Corp ,  高砂香料工業株式会社

Inventor： NAKAMURA JUNJI ,  NUMAZAWA SHIGEYOSHI ,  KENMOCHI HIROYUKI ,  HORI YASUSHI

IPC: C07D307/77 ,  C07D307/93

Abstract: PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure which gives a polymer having more excellent properties as a resist material or the like, and an alcohol having a lactone structure useful as a raw material therefor or the like.
SOLUTION: The compound is represented by general formula [1] (wherein either one of R
1 and R
2 is a hydrogen atom, an acryloyl group or a methacryloyl group and the other is an alkyl group; R
3 and R
4 are each independently a hydrogen atom or an alkyl group; R
5 and R
6 are each a hydrogen atom or form a methylene chain optionally substituted with an alkyl group; and R
7 and R
8 are each independently a hydrogen atom or a methyl group).
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有内酯结构的新型单体化合物，其赋予作为抗蚀剂材料等具有更优异性能的聚合物，以及具有可用作其原料的内酯结构等的醇 。 解决方案：该化合物由通式[1]表示（其中R 1和R 2中的任一个是氢原子，丙烯酰基或甲基丙烯酰基 基团，另一个是烷基; R 3和R 4彼此独立地是氢原子或烷基; R 5和R 4都是 各自为氢原子或形成任选被烷基取代的亚甲基链; R“SP”7和R“SP”8各自独立地为氢 原子或甲基）。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005247745A

公开(公告)日：2005-09-15

申请号：JP2004060051

申请日：2004-03-04

Applicant: Takasago Internatl Corp ,  高砂香料工業株式会社

Inventor： SAWAKI TOMOYA ,  NAKAMURA JUNJI ,  HORI YASUSHI ,  NUMAZAWA SHIGEYOSHI

IPC: C07C69/54 ,  C07C67/08 ,  C07C67/14 ,  C07F1/02 ,  C07F3/02

Abstract: PROBLEM TO BE SOLVED: To provide a new monomer having a cyclohexane structure replaced with a plurality of alkyl groups and capable of providing a polymer such as a resist material responsive to high energy beam, excellent in sensitivity, resolution property and etching resistance and useful for fine processing with electron beam and far-ultraviolet light and to provide a method for producing the monomer. SOLUTION: The (meth)acrylate is represented by general formula (1) (wherein R 1 , R 2 and R 3 may be same or different and they are each an alkyl group; R 4 is a hydrogen atom or a methyl group). The method for producing the compound comprises using a metal or a metal compound. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有被多个烷基取代的环己烷结构的新型单体，并能够提供对高能束响应的聚合物如抗蚀剂材料，灵敏度，分辨率和耐蚀刻性优异 并且可用于用电子束和远紫外光的精细加工，并提供制备单体的方法。 解决方案：（甲基）丙烯酸酯由通式（1）表示（其中R 1 ，R 2 和R 3 相同或不同，它们各自为烷基; R 4为氢原子或甲基。 制备该化合物的方法包括使用金属或金属化合物。 版权所有（C）2005，JPO＆NCIPI