Invention Patent
- Patent Title: (meth)acrylate and method for producing the same
- Patent Title (中): (METH)丙烯酸酯及其制备方法
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Application No.: JP2004060051Application Date: 2004-03-04
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Publication No.: JP2005247745APublication Date: 2005-09-15
- Inventor: SAWAKI TOMOYA , NAKAMURA JUNJI , HORI YASUSHI , NUMAZAWA SHIGEYOSHI
- Applicant: Takasago Internatl Corp , 高砂香料工業株式会社
- Assignee: Takasago Internatl Corp,高砂香料工業株式会社
- Current Assignee: Takasago Internatl Corp,高砂香料工業株式会社
- Priority: JP2004060051 2004-03-04
- Main IPC: C07C69/54
- IPC: C07C69/54 ; C07C67/08 ; C07C67/14 ; C07F1/02 ; C07F3/02
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer having a cyclohexane structure replaced with a plurality of alkyl groups and capable of providing a polymer such as a resist material responsive to high energy beam, excellent in sensitivity, resolution property and etching resistance and useful for fine processing with electron beam and far-ultraviolet light and to provide a method for producing the monomer. SOLUTION: The (meth)acrylate is represented by general formula (1) (wherein R 1 , R 2 and R 3 may be same or different and they are each an alkyl group; R 4 is a hydrogen atom or a methyl group). The method for producing the compound comprises using a metal or a metal compound. COPYRIGHT: (C)2005,JPO&NCIPI
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