Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing a 2-alkyl-2-adamantyl (meth)acrylate having excellent physical properties such as excellent dry etching resistance in a semiconductor production process and useful as a semiconductor resist material in high pyrity and yield. SOLUTION: The 2-alkyl-2-adamantyl (meth)acrylate expressed by general formula (2) (R 1 is a 1-3C alkyl; and R 2 is acryloyl group or methacryloyl group) is produced by reacting a 2-alkyl-2-adamantanol expressed by general formula (1) with an alkyl magnesium halide or a phenyl magnesium halide and then reacting with a (meth)acryloylation agent. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide an asymmetric synthesis catalyst having excellent performance as a catalyst for catalytic asymmetric synthesis reaction including chemical selectivity, enantio-selectivity, catalytic activity and the like, and a ligand therefor. SOLUTION: The optically active phosphine compound is represented by formula (1) (wherein R 1 , R 4 and R 5 each represents a hydrogen atom, a (cyclo)alkyl group or the like; R 6 , R 7 , R 8 and R 9 each represents a (cyclo)alkyl group or the like; p+q and r+s are in the range of 0 to 5). Its use in an asymmetric synthesis reaction is disclosed. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer having a cyclohexane structure replaced with a plurality of alkyl groups and capable of providing a polymer such as a resist material responsive to high energy beam, excellent in sensitivity, resolution property and etching resistance and useful for fine processing with electron beam and far-ultraviolet light and to provide a method for producing the monomer. SOLUTION: The (meth)acrylate is represented by general formula (1) (wherein R 1 , R 2 and R 3 may be same or different and they are each an alkyl group; R 4 is a hydrogen atom or a methyl group). The method for producing the compound comprises using a metal or a metal compound. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive, versatile and catalytically active new multicomponent oxidation catalyst which can be effectively used, for example, for epoxidation reaction of olefins or the like, and a method for producing an epoxy body by hydrogen peroxide oxidation of an olefin using it as the catalyst. SOLUTION: The multicomponent oxidation catalyst comprises a tungsten compound, a quaternary ammonium salt, phosphoric acids and/or boric acids, and a hydrogen sulfate. And the method for producing an epoxy compound is characterized by the hydrogen peroxide oxidation of the olefins in the presence of the multicomponent oxidation catalyst. The epoxy compound produced by the method is useful as an intermediate of an agricultural chemical or a medicine or the like, or a raw material or the like of various polymers. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure and capable of providing a polymer having excellent characteristics as a resist material or the like. SOLUTION: The compound is represented by general formula [1] (wherein R 1 and R 2 are each independently an alkyl group; R 3 and R 4 are each independently a hydrogen atom or an alkyl group; R 5 is a hydrogen atom, an acryloyl group or a methacryloyl group; X is a methylene group which may be substituted with an alkyl group or an ethylene group which may be substituted with the alkyl group). The present invention provides a compound having a lactone structure and providing a polymer having excellent characteristics, especially as a resist material and an alcohol substance having a lactone structure useful as the raw material or the like. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation:要解决的问题:提供具有内酯结构并能够提供具有优异特性的聚合物作为抗蚀剂材料等的新单体化合物。 解决方案:该化合物由通式[1](其中R 1和R 2各自独立地是烷基)表示; R 3 = SP>和R“SP 4”各自独立地为氢原子或烷基; R 5为氢原子,丙烯酰基或甲基丙烯酰基; X为亚甲基 其可以被可被烷基取代的烷基或亚乙基取代)。 本发明提供具有内酯结构并提供具有优异特性的聚合物的化合物,特别是作为抗蚀剂材料和具有用作原料等的内酯结构的醇物质。 版权所有(C)2005,JPO&NCIPI